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A More Efficient Approach for Monte Carlo Simulation of Deeply-Channeled Implanted Profiles in Single-Crystal Silicon

  • Shyh-Horng Yang (a1), David Lim (a1), Steven J. Morris (a1) and AL F. Tasch (a1)

Abstract

In this paper is reported a new approach for the Monte Carlo simulation of deeply-channeled implanted profiles in single-crystal silicon which has greatly improved efficiency. This approach has been successfully implemented in the UT Monte Carlo code (UT-MARLOWE). A time savings of up to 212X has been observed with a 4-stage simulation. A simulation of arsenic implants with 15 keV implant energy typically takes about 12 minutes on a workstation.

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1 Biersack, J. P. and Haggmark, L. G., Nucl. Inst. Meth., 174, 646 (1980).
2 Mulvaney, B. J., Richardson, W. B., and Crandle, T. L., IEEE Trans. Computer-Aided Des., 8 (4), 336(1989).
3 Crandle, T. L. and Mulvaney, B. J., IEEE Electron Device Lett., 11 (1), 42 (1990).
4 Robinson, M. T. and Torrens, I. M., Phys. Rev. B., 9 (12), 5008 (1974).
5 Srinivasan, G. R., IEEE IEDM Tech. Dig., 687 (1989).
6 Moore, J. S. and Srinivasan, G. R., J. Electrochem Soc. 135 (8), 2034 (1988).
7 Brannon, K. W. and Lever, R. F., Mater. Res. Soc. Proc. 100, 1988, pp. 249254.
8 Azziz, N., Brannon, K. W., and Srinivasan, G. R., Mater. Res. Soc. Proc. 45, 1985, pp. 7176.
9 Klein, K. M., Park, C. and Tasch, A. F., IEEE Trans. Electron Dev., 39 (7), 1614 (1992).
10 Hobler, G. and Potzl, H. W. , Mater. Res. Soc. Proc. 279, 1993, pp. 165170.
11 Klein, K., Park, C., and Tasch, A.F., Appl. Phys. Lett., 57 (25), 2701 (1990).
12 Klein, K., Park, C., and Tasch, A. F., Nucl. Inst. Meth. Phys. Res. B, 59/60, 60 (1991).
13 Yang, S., Morris, S., Lim, D., and Tasch, A. F., to be published.
14 Echenique, P. M., Nieminen, R. M., and Ritchie, R. H., Solid State Comm, 37, 779 (1981).
15 Barberan, N. and Echenique, P. M., J. Phys. B, 19, L81 (1986).

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