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Molecular-Dynamics Simulations of Hydrogenated Amorphous Silicon Thin-Film Growth

  • T. Ohira (a1), O. Ukai (a1), M. Noda (a1), Y. Takeuchi (a2), M. Murata (a2) and H. Yoshida (a2)...

Abstract

We have performed molecular-dynamics (MD) simulations of hydrogenated amorphous silicon (a-Si:H) thin-film growth using realistic many-body semiclassical potentials developed to describe Si-H interactions. In our MD model, it was assumed that SiH3, SiH2 and the H radicals are main precursors for the thin-film growth. In MD simulations of a-Si:H thin-film growth by many significant precursor SiH3 radicals, we have evaluated average radical migration distances, defect ratios, hydrogen contents, and film growth rates as a function of different incident radical energies to know the effect of the radical energization on the properties. As a result of the comparison between the numerical and experimental results, it was observed that the agreement is fairly good, and that an increase of radical migration distance due to the radical energization is effective on a- Si:H thin-film growth with a low defect.

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Molecular-Dynamics Simulations of Hydrogenated Amorphous Silicon Thin-Film Growth

  • T. Ohira (a1), O. Ukai (a1), M. Noda (a1), Y. Takeuchi (a2), M. Murata (a2) and H. Yoshida (a2)...

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