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Molecular-Dynamics Simulation of Thin-Film Growth

  • Matthias Schneider (a1), Ivan K. Schuller (a1) and A. Rahman (a2)

Abstract

The epitaxial growth of thin films has been studied by molecular-dynamics computer simulation. In these simulations atoms are projected towards a temperature-controlled substrate, and the equations of motion of all atoms are solved for a given interaction potential. The calculations give insight into the microscopic structure of thin films, the dynamics of the adsorption process, and they help answer the way in which substrate temperature, form of the substrate, flux of impinging atoms, and form of the interaction potential, affect epitaxial growth. Simulations were performed for monatomic and binary systems with spherically symmetric atomic interactions, and for systems in which the atoms are interacting via a three-body potential to simulate the epitaxial growth of silicon.

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[1] For a review see, Epitaxial Growth, edited by Matthews, J. W. (Academic Press, New York, 1975).
[2] See for instance, Venables, J. A., Vacuum 33, 701 (1983), and references cited therein.
[3] For a review see, Abraham, F. F., Adv. Phys. 35, 1 (1986).
[4] Schneider, M., Rahman, A. and Schuller, I. K., Phys. Rev. Lett. 55, 604 (1985).
[5] Schneider, M., Rahman, A. and Schuller, I. K., Phys. Rev. B 34, 1802 (1986).
[6] Giessen, B. C., Proc. 4th Int. Conf. on Rapidly Quenched Metals, eds., Masumoto, T. and Suzuki, K., Vol. 1 (Japan Inst. Metals, Sendai, 1982), p. 213;
Sommer, F., Fripan, M., Predel, B., Proc. 4th Int. Conf. on Rapidly Quenched Metals, eds., Masumoto, T. and Suzuki, K., Vol. 1 (Japan Inst. Metals, Sendai, 1982), p. 209.
[7] Dodson, B.W., Phys. Rev. B 33, 7361 (1986).
[8] Schneider, M., Schuller, I. K. and Rahman, A. (to be published).
[9] Stillinger, F. H. and Weber, T. A., Phys. Rev. B31, 5262 (1985).
[10] See for instance, Thomas, R. N. and Francombe, M. H., Appl. Phys. Lett. 11 108 (1967).

Molecular-Dynamics Simulation of Thin-Film Growth

  • Matthias Schneider (a1), Ivan K. Schuller (a1) and A. Rahman (a2)

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