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Moisture and Purity in Polyimide Coatings

  • A. J. Beuhler (a1), M. J. Burgess (a1), D. E. Fjare (a1), J. M. Gaudette (a1) and R. T. Roginski (a1)...

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Moisture and ionic impurities play a major role in the failure mechanism of integrated devices. [1] The use of organic polymers as microelectronic coatings offers advantages in improved planarization of metal steps, low temperature processibility, and reduction of mechanical stresses. [2] Cited disadvantages are the high inherent moisture absorption and level of impurities. Polymers introduce levels of moisture and impurities 10–100 times greater than vacuum deposited inorganic insulators.[3] Moreover, the combination of ionic impurities and a high humidity environment will degrade attractive polymer properties such as high resistivity and low dielectric constant. [4]

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1. Senturia, S.D., Miller, R.A., Denton, D.D., Recent Advances in Polymer Science and Technology, edited by Webber, W.D., Society of Plastics Engineers, Poughkeepsie, N.Y., p.351361.
2. Kinsman, K.R., Natarajan, B., Thin Solid Films, 166, 8393 (1988).
3. Pliskin, W.A., Gdula, R.A., Handbook on Semiconductors, edited by Moss, T.S., North-Holland 1980, p. 664.
4. Smith, F.W., Neuhaus, H.J., Senturia, S.D., J. of Electronic Materials, 16, 1, 93106 (1987).
5. Gordon, S.F., Huffman, W.A., IPC Technical Review, February 1988.
6. Suzuki, H., Sekine, H., Sato, H., Makino, D., Recent Advances in Polymer Science and Technology, edited by Webber, W.D., Society of Plastics Engineers, Poughkeepsie, N.Y. (1987) p. 389399.
7. Zaikov, G.E., lordanskii, A.P., Diffusion of Electrolytes in Polymers, (VSP BV), (1988), p.55.
8. Beuhler, A.J., Nowicki, N.R., Gaudette, J.M., ACS Polymer Mat. Sci. and Eng., 59 (1988).
9. Sheppard, N.F., Senturia, S.D., Proceedings of 1986 Conference on Electrical Insulation and Dielectric Phenomena, November 1986.
10. ASTM method E104.
11. Brown, C.A., Polymer Materials for Electronic Applications, ACS Symposium Series 184, 1980, p. 151 - 171.
12. Neuhaus, H.J., Day, D.R., Senturia, S.D., J. Electronic Materials, 14, 379 (1985).
13. Bondi, A., J. Phys. Chem. 68, 44 (1964).
14. Bondi, A., Physical Properties of Molecular Crystals, Liquids, and Gases, John Wiley & Sons, New York, N.Y. 1968.
15. Communication with Senturia, S., May 1989.

Moisture and Purity in Polyimide Coatings

  • A. J. Beuhler (a1), M. J. Burgess (a1), D. E. Fjare (a1), J. M. Gaudette (a1) and R. T. Roginski (a1)...

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