Skip to main content Accessibility help
×
×
Home

Modulation Spectroscopy Characterization of Semiconductor Heterostructures

  • H. Qiang (a1), D. Yan (a1), Yichun Yin (a1) and Fred H. Pollak (a1)

Abstract

This paper reviews the use of modulation spectroscopy for the characterization of a wide variety of semiconductor heterostructures and devices. Some systems that will be discussed include pseudomorphic GaAlAs/InGaAs/GaAs modulation-doped quantum well high electron mobility transistors (including the 300K determination of the two-dimensional electron gas density), GaAlAs/GaAs, InP/InGaAs, InGaP/GaAsInAlAs/InGaAs and InGaAs/GaAs heterojunction bipolar transistors (including the determination of the built-in fields/doping levels in the emitter and collector regions), GaAs/GaAlAs quantum well infrared detectors, quantum well lasers and GaAs/GaAlAs quantum dots. Particular attention will be paid to non-destructive, contactless techniques such as photoreflectance, contactless electroreflectance and differential reflectometry that can be performed on entire wafers.

Copyright

References

Hide All
1 Pollak, F. H. and Shen, H., Materials Science and Engineering R10, 375(1993).
2 Glembocki, O. J. and Shanabrook, B. V., Semiconductors and Semimetals, Vol. 67, ed. Seiler, D.G. and Littler, C.L. (Academic, New York, 1992) p. 222.
3 Pollak, F.H., Qiang, H., Yan, D., Yin, Y., and Boccio, V.T., Photonics Spectra Magazine. Vol. 27, Issue 8, August 1993, p. 78; also, H. Qiang, D. Yan, Y. Yin and F. H. Pollak, to be published in Asia-Pacific Engineering Journal. Part A: Electrical Engineering (1993).
4 Tang, Y-S., Wilkinson, C.D.W., Sotomayor Torres, CM., Smith, D.W., Whall, T.E. and E.H.C, Parker, Superlattices and Microstuctures 12, 535 (1992); also, Solid State Comm. 85, 199 (1993).
5 Qiang, H., Pollak, F. H., Tang, Y., Wang, P.D., and Sotomayor Torres, C.M., submitted to Appl. Phys. Lett.
6 Wang, P.D., Sotomayor Torres, C.M., M.C, Holland, Qiang, H., Pollak, F.H. and Gumbs, G., Symposium K/M of this conference.
7 Mei, G., Carpenter, S., Felton, L.E. and Persans, P.D., J. Opt. Soc. Am. B9, 1394(1992); P.D. Persans, M. Silvestri, G. Mei, E. Lu, H. Yuselici and J. Schroeder, Brazilian J. Phys. 23, 144 (1993); F. Hache, D. Ricard and C Flytzanis, Appl. Phys. Lett. 55, 1504 (1989).
8 Boccio, V.T. and Pollak, F.H., private communication
9 Yin, Y., Qiang, H., Pollak, F.H., Streit, D.C. and Wojtowicz, M., Appl. Phys. Lett. 61, 1579(1992); also, Proc. SPIE 1675. 498(1992).
10 Yin, Y., Qiang, H., Yan, D., Pollak, F.H., and Noble, T.F., Semicon. Sci. Technol. 8, 1599(1993).
11 Dimoulas, A., Zekentes, K., Androulidaki, M., Koraelios, N., C, Michelakis and Hatzopoulos, Z., Appl. Phys. Lett. 63, 1417 (1993).
12 Sydor, M., Engholm, J.R., Manasreh, M.O., Evans, K.R., Stutz, C.E. and W.C, Mitchel, Phys. Rev. B45, 13796 (1992).
13 Yin, X., Pollak, F. H., Pawlowicz, L., O–Neill, T. J. and Hafizi, M., Appl. Phys. Lett. 56, 1278 (1990).
14 Yin, X., Pollak, F. H., Pawlowicz, L., O'Neill, T. J. and Hafizi, M., Proc. Soc. Photo-Optical Instrum. Engineers (SPIE. Bellingham, 1990) 1286. 404 (1990).
15 Bottka, N., Gaskill, D. K., Wright, P. D., Kaliski, R. W. and Williams, D. A., J. Cryst. Growth 107, 893 (1991).
16 Yan, D., Pollak, F.H., Boccio, V.T., Lin, C.L., Kirchner, P.D., Woodall, J. M., R.C, Gee and Asbeck, P.M., Appl. Phys. Lett. 61, 2066 (1992).
17 Yang, L.W., Martin, P.A., Mazurowski, J.S., Ballingall, J.M., Y.Yin, , Yan, D., Pollak, F.H., West, W., Davito, D.B. and Kirchner, P.D., 1993 Electronic Materials Conference, Santa Barbara, June 1993 and submitted to J. Electron. Mats.
18 Hsu, K.T., Chen, Y.H., Chen, K.L., Chen, H.P., Lin, H.H. andJan, G.J., submitted to Appl. Phys. Lett.
19 Badakhshan, A., C, Durbin, Giordona, A., Glosser, R., Lambert, S. A. and Liu, J., eds. Reed, M. A. and Kirk, W. P. (Academic, New York, 1989) p. 485.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed