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Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion Implantation

Published online by Cambridge University Press:  01 February 2011

Muhamed Niklaus ,
Samuel Rosset ,
Massoud Dadras ,
Philippe Dubois  and
Herbert R. Shea
Muhamed Niklaus
Affiliation:
muhamed.niklaus@epfl.ch, EPFL, LMTS, Rue Jaquet-Droz 1, Case postale 526, Neuchâtel, 2002, Switzerland, +41 32 720 51 82, +41 32 720 57 54
Samuel Rosset
Affiliation:
samuel.rosset@epfl.ch, EPFL, LMTS, Neuchâtel, 2002, Switzerland
Massoud Dadras
Affiliation:
massoud.dadras@unine.ch, University of Neuchâtel, IMT, Neuchâtel, 2002, Switzerland
Philippe Dubois
Affiliation:
philippe.dubois@epfl.ch, EPFL, LMTS, Neuchâtel, 2002, Switzerland
Herbert R. Shea
Affiliation:
herbert.shea@epfl.ch, EPFL, LMTS, Neuchâtel, 2002, Switzerland
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Abstract

We present a study of the influence on Young's modulus, stress and electrical conductivity of poly-dimethylsiloxane membranes implanted with titanium ions at energies from 5 to 35 keV, with doses up to 8×1016 ions/cm2. The motivation for this study was to find the optimum implantation conditions to create electrodes for microfabricated dielectric electroactive polymer actuators, which must combine low resistivity with low stiffness. Two implantation techniques are used, Filtered Cathodic Vacuum Arc (FCVA) and the more conventional Low Energy broad beam Implanter (LEI). Of the two, it is found that the FCVA implanter is much better suited to create compliant electrodes.

Keywords

ion-implantationpolymerelastic properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD03-10
Copyright
Copyright © Materials Research Society 2008

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References

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