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Modelling of Failure Time Distributions for Interconnects Due to Stress Voiding and Electromigration

  • W. G. Wolfer (a1), M. C. Bartelt (a2), J. J. Dike (a2), J. J. Hoyt (a2), R. J. Gleixner (a3) and W. D. Nix (a3)...

Abstract

A status report is given on a comprehensive modeling project aimed at predicting failure time distributions of interconnect lines. We discuss our novel approach to calculate the evolution of stresses in lines using elastic response functions. It is argued that this approach makes it possible to model the stress and damage evolution in a large ensemble of lines efficiently so that statistically meaningful failure time distributions can be generated.

The elastic response functions enable us also to derive a generalized Korhonen equation which includes the effects of mass transport at remote locations. Basic features of this equation are demonstrated with a one-dimensional implementation and its results are compared with the classical Korhonen [8, 9, 10] model.

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1. Marcoux, P.J., Merchant, P.P., Naroditsky, V., Rehder, W.D., Hewlett-Packard Journal 6, 79 (1989)
2. Bartelt, M.C., Hoyt, J.J., Bartelt, N.C., Dike, J.J., Wolfer, W.G., Mat. Res. Soc. Symp. Proc. Vol. 505 (1998), to be published
3. Kroener, E., in Micomechanics and Inhomogeneity, ed. by Weng, G.J., Taya, M., Abe, H., Springer -Verlag, New York 1989, p. 197
4. Mura, T., Micromechanics of Defects in Solids, M. NijhoffPubl., The Hague, 1982, chapter 110.1007/978-94-011-9306-1
5. Bui, H.D., Int. J. Solids Structures 14, 935 (1978)10.1016/0020-7683(78)90069-0
6. Brebbia, C. A., Telles, J.C.F., Wrobel, L.C., Boundary Element Techniques, Springer-Verlag, New York, 1984, p.258 10.1007/978-3-642-48860-3
7. Radowicz, A., in New Problems in Mechanics of Continua, Proc. of 3rd Swedish-Polish Symp. on Mechanics, Jablonna, Poland 1982, Univ, Waterloo Press 1983, p. 103
8. Korhonen, M.A., Borgensen, P., Tu, K. N., Li, Che-Yu, J. Appl. Phys. 73, 3790 (1993)10.1063/1.354073
9. Korhonen, M.A., Borgensen, P., Brown, D.D., Li, Che-Yu, J. Appl. Phys. 73, 4994 (1993)10.1063/1.354073
10. Brown, D.D., Sanchez, J.E. Jr., Korhonen, M.A., Li, Che-Yu. Appl. Phys. Lett. 67, 439 (1995)10.1063/1.114625

Modelling of Failure Time Distributions for Interconnects Due to Stress Voiding and Electromigration

  • W. G. Wolfer (a1), M. C. Bartelt (a2), J. J. Dike (a2), J. J. Hoyt (a2), R. J. Gleixner (a3) and W. D. Nix (a3)...

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