Skip to main content Accessibility help

Modeling of the Ion-Beam Growth of Covalently-Bonded Diamondlike Materials

  • H. C. Hofsäss (a1), M. Sebastian (a1), H. Feldermann (a1), R. Merk (a1) and C. Ronning (a1)...


A characteristic ion energy and substrate temperature dependence for the formation of tetra-hedral amorphous carbon (ta-C), cubic boron nitride (c-BN) and related diamondlike materials by ion deposition has been experimentally observed. We present an analytical model for diamondlike film growth that describes the transient modification of the film structure by successive individual ion impact events. Each ion impact is treated as a cylindrical thermal spike with a finite initial width, taking into account energy loss and energy dissipation processes. We show that rearrangement of atoms during a cylindrical spike is the dominant mechanism leading to the formation of the diamondlike phase. The model explains quantitatively the observed ion energy dependence of the sp3 bond fraction in ta-C, as well as the broad range of ion energies for which c-BN growth is observed.



Hide All
1. Hofsäss, H., Ronning, C., in Singh, J., Copley, S. M., Mazumder, J. (eds.), Proc, 2nd Int, Conf. on Beam Processing of Advanced Materials, (ASM International, Materials Park 1996) p. 29
2. Mirkarimi, P.B., McCarty, K.F., Medlin, D.L.: Mat. Sei. Eng. Rep. (1997) to be published
3. Ronning, C., Dreher, E., Thiele, J.U., Oelhafen, P., Hofsäss, H., Diam. Relat. Mater. 6, 830 (1997)
4. Hofsäss, H., Feldermann, H., Sebastian, M., Ronning, C., Phys. Rev. B 55, 13230 (1997)
5. Uhlmann, S., Ph.D thesis, University Chemnitz (1997)
6. Robertson, J., Diam. Relat. Mater. 2, 984 (1993)
7. Davis, C.A., Thin Solid films 226, 30 (1993)
8. McKenzie, D.R., Muller, D., Pailthorpe, B.A., Phys. Rev. Lett. 67, 773 (1991)
9. Tamor, M.A. in Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., Murakawa, M. (eds), Applications of Diamond Films and Related Materials: Third International Conference, NIST Special Publication 885 (NIST, Gaithersburg 1995) p. 691
10. McKenzie, D.R., J. Vac. Sci. Technol. B 11, 1928 (1993)
11. Marks, N.A., McKenzie, D.R., Pailthorpe, B.A., Phys. Rev. B 53, 4117 (1996)
12. Sullivan, J.P., Friedmann, T.A., Tallant, D.R., Mikkalson, J., Rieger, D.J., Baca, A.G., Martinez-Miranda, L.J., Appl. Phys. Lett. (1997) to be published
13. Hofsäss, H., Feldermann, H., Merk, R., Sebastian, M. and Ronning, C., App. Phys. A, Materials Science & Processing (1998) to be published
14. Lifshitz, Y., Lempert, G.D., Grossman, E., Phys. Rev. Lett. 72, 2753 (1994)
15. Hahn, J., Richter, F., Pintaske, R., Roder, M., Schneider, E., Welzel, T., Surf. Coat. Technol. 92, 129(1997)
16. Taylor, C.A. II and Clarke, R., Appl. Phys. Lett. 71, (1997) to be published
17. Feldermann, H., Merk, R., Sebastian, M., Restie, M., Ronning, C., Hofsäss, H., Appl. Phys. Lett. (1998) to be published
18. Kuroyanagi, A., J. Appl. Phys. 68, 5567 (1990)
19. Ronning, C., Dreher, E., Feldermann, H., Sebastian, M., Zweck, J., Fischer, R., Hofsäss, H., Mat. Res. Soc. Symp. Proc. 449, 331 (1997)
20. Ronning, C., Hofsäss, H. in Ravi, K.V., Dismukes, J.P. (eds.), Diamond Materials IV. Proc. 4th Int. Symposium. (The Electrochemical Society, Pennington 1995) pp. 359364
21. Hofsäss, H., Ronning, C., Griesmeier, U., Gross, M., Reinke, S., Kuhr, M., Appl. Phys. Lett. 67, 46 (1995)
22. Seitz, F., Koehler, J.S.: Solid State Physics 2, 305 (1956)
23. Ziegler, J.F., Biersack, J.P., Littmark, U., The Stopping and Ranges of Ions in Matter. Vol. 1 (Pergamon, Oxford, 1985)

Modeling of the Ion-Beam Growth of Covalently-Bonded Diamondlike Materials

  • H. C. Hofsäss (a1), M. Sebastian (a1), H. Feldermann (a1), R. Merk (a1) and C. Ronning (a1)...


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed