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Modeling of Nanoimprinting of Metals by Nanotube Arrays

  • Lili Li (a1), Zhenhai Xia (a2) and Yanqing Yang (a3)


Molecular dynamics (MD) simulations are reported for buckling and interfacial friction of single- and multi-wall carbon nanotubes (CNT) with interwall sp 3 bonds imprinted on copper substrates. A small perturbation of mechanical vibration is applied to the systems in the nanoimprinting. The imprinting capabilities of multi-wall CNTs are much better than single-wall CNTs. While the single-wall CNT is insensitive to the vibration, the indentation force and buckling of multi-wall CNTs with interwall sp 3 bonding is dependent on the amplitude of the perturbation, providing a way to controlling the interfacial friction. There is an optimal amplitude, at which the buckling and friction force of the CNTs are minimized in nanoimprinting.



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1. Lister, K. A., Thoms, S., Macintyre, D.S., Wilkinson, C.D.W., Weaver, J. M. and Casey, B. G., J. Vac. Sci. Technol. B 22, 3257(2004).
2. Nishio, K., Yasui, K., Matsumoto, F., Kanezawa, K. and Masuda, H., Adv. Mater. 17 1293(2005).
3. Chen, H.L., Chuang, S.Y., Cheng, H.C., Lin, C.H. and Chu, T.C., Microelectron. Eng. 83, 893(2006).
4. Guo., L Jay J. Phys. D: Appl. Phys. 37, 123141(2004).
5. Cross, Graham L W. J. Phys. D: Appl. Phys. 39, 363386(2006).
6. Hirai, Y., Konishi, T., Yoshikawa, T. and Yoshida, S., J. Vac. Sci. Technol. B 22 (2004) 3288
7. Hirai, Y., Yoshida, S. and Takagi, N., J. Vac. Sci. Technol. B, 21, 2765(2003).
8. Young, W.B., Microelectronic. Eng. 77, 405(2005).
9. Pei, Q. X., Lu, C., Liu, Z.S. and Lam, K Y, J. Phys. D: Appl. Phys. 40, 49284935(2007).
10. Kang, J., Kim, K.S. and Kim, K.W., Tribology Letters, 25, 93102 (2007).
11. Hirai, Y., Yoshida, S., Takagi, N., Tanaka, Y., Yabe, H., Sasaki, K., Sumitani, H. and Yamamoto, K., Jpn. J. Appl. Phys. 42, 3863(2003).
12. Hirai, Y., Konishi, T., Yoshikawa, T. and Yoshida., S. J. Vac. Sci. Technol. B 22 (2004) 3288.
13. McCarthy, B., Coleman, J.N., Czerw, R., Dalton, A.B., in het Panhuis, M. and Maiti, A. et al., J. Phys. Chem. B 106, 22102216(2002).
14. Xia, Z. H., Guduru, P. and Curtin, W. A., Physical Review Letters, 98, 245501 (2007).
15. Brenner, D. W., Shenderava, O. A., Harrison, J. A et al. J. Phys.: Condens. Matter 14, 783802(2002).
16. Brenner, D. W.. Phys. Rev. B 42, 94589471(1990).
17. Gómez, Liliana, Dobry. Phys. Rev. B 55, 62656271(1997)
18. Cleri, Fabrizio, Rosato, Vittorio. Phys. Rev. B 48, 2233(1993).
19. Maekawa, K., Itoh, A.. Wear 188, 115122(1995)
20. Komanduri, R., Chandrasekaran, N., Raff, L.M.. Sciences 43, 22372260(2001).
21. Xia, Z. H., and Curtin, W. A., Composites Science and Technology, 67, 15181529 (2007).



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