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Modeling and Characterization of the Hydrogenated Amorphous Silicon Metal Insulator Semiconductor Photosensors for Digital Radiography

  • Nader Safavian (a1), Y. Vygranenko (a2), J. Chang (a3), Kyung Ho Kim (a4), J. Lai (a5), D. Striakhilev (a6), A. Nathan (a7), G. Heiler (a8), T. Tredwell (a9) and M. Fernandes (a10)...

Abstract

Because of the inherent desired material and technological attributes such as low temperature deposition and high uniformity over large area, the amorphous silicon (a-Si:H) technology has been extended to digital X-ray diagnostic imaging applications. This paper reports on design, fabrication, and characterization of a MIS-type photosensor that is fully process-compatible with the active matrix a-Si:H TFT backplane. We discuss the device operating principles, along with measurement results of the transient dark current, linearity and spectral response.

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