Skip to main content Accessibility help
×
Home

Modeling Analysis of Free-Spreading Sublimation Growth of SiC Crystals

  • M. V. Bogdanov (a1), S. E. Demina (a1), S. Yu Karpov (a1), A. V. Kulik (a1), D. Kh Ofengeim (a1), M. S. Ramm (a1), E. N. Mokhov (a2), A. D. Roenkov (a2), Yu. A. Vodakov (a2), Yu. A. Makarov (a3) and H. Helava (a4)...

Abstract

Recently, an advanced technique for growing free-spreading SiC bulk crystals by sublimation has been demonstrated. This method was used to grow 6H- and 4H-SiC boules free of polycrystalline deposits on the crystal periphery, up to 35 mm in diameter with the micropipe density less than 20 cm-2 and the dislocation density about 102-103 cm-2. In this paper, we report on the numerical modeling of free-spreading crystal growth. We consider the global heat transfer in an inductively heated growth system, species transport in the growth cell and in the powder charge, and thermoelastic stress, focusing on the crystallization front dynamics, poly-SiC deposition, and powder source evolution. Special attention was given to the validation of the simulations. The computed thermal field and evolution of the powder and crystal shape were found to agree qualitatively with observations.

Copyright

References

Hide All
1. Vodakov, Yu.A., Ramm, M.G., Mokhov, E.N., Roenkov, A.D., Makarov, Yu.N., Karpov, S. Yu., Ramm, M.S., and Helava, H.: US Patent 6,428,621 (2002).
2. Mokhov, E.N., Ramm, M.G., Ramm, M.S., Roenkov, A.D., Vodakov, Yu.A., Karpov, S.Yu., Makarov, Yu.A., and Helava, H., to be published in Proc. ECSCRM2002 (Mat. Sci. Forum).
3. Bogdanov, M.V., Galyukov, A.O., Karpov, S. Yu., Kochuguev, S.K., Ofengeim, D.Kh., Tsiryulnikov, A.V., Ramm, M.S., Zhmakin, A.I., and Makarov, Yu.N., J. Cryst. Growth 225, 307 (2001).
4. Vodakov, Yu.A., Roenkov, A.D., Ramm, M.G., Mokhov, E.N., and Makarov, Yu.N., Phys. Stat. Sol. (b) 202, 177 (1997).
5. Karpov, D.S., Bord, O.V., Karpov, S. Yu., Zhmakin, A.I., Ramm, M.S., and Makarov, Yu.N., Mat. Sci. Forum. 353–356, 37 (2001).
6. Wellmann, P. J., Bickermann, M., Hoffmann, D., Kadinski, L., Selder, M., Straubinger, T. L., and Winnacker, A., J. Cryst. Growth 216, 263 (2000).
7. Jordan, A.S., von Neida, A.R., and Caruso, R., J. Cryst. Growth 70, 555 (1984).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed