We have modified the model of rotational relaxation of stresses at mismatched interface by taking into account elastic strains of the growing film. This extended the model validity range to a wider class of compounds including pnictides. The model describes formation of low angle boundaries consisting of threading edge dislocations. Calculated interface energy shows that rotational relaxation occurs due to finite size of clusters and to non-equilibrium effect of the film growth. Subgrain size and expected angle of domain rotation depending on the lattice mismatch have been estimated. Unusual effect of increasing angle between the film subgrains at reduction of the deposition rate is predicted. The computed parameters of subgrains are consistent with the observed film nanostructure.