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MOCVD of Aluminum Oxide Barrier Coating

  • Jun C. Nable (a1), Malgorzata A. Gulbinska (a1), Steven L. Suib (a1) (a2) and Francis S. Galasso (a1)

Abstract

High temperature materials such as nickel superalloys require the development of corrosion resistant coatings. These coatings must be thermally stable and chemically inert in order to protect the substrate material. Aluminum oxide is one such candidate. Aluminum acetylacetonate was used as the precursor for metal-organic chemical vapor deposition at atmospheric pressure. Uniform, amorphous, and multi-colored protective coatings were deposited onto nickel substrates at 400 to 500°C and dark gray, and powdery coatings were obtained at higher temperatures of 550 to 600°C. The coating was free from cracks when higher carrier gas flow rate were used.

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1. Goward, G.W., Surf. Coat.& Tech. 108, 7379 (1998)
2. Dumitrescu, L., Maury, F., Surf. Coat.& Tech. 125, 419423 (2000)
3. Sundgren, J.E., Hentzell, H.T.G., J. Vac. Sci. Tech. A4, 22592279 (1986)
4. Bae, Y., Lee, W., Besmann, T., Cavin, O., Watkins, T., J. Am. Cer. Soc. 81, 7, 19451948 (1998)
5. Birks, N., Meier, G., Pettit, F., J. Met. 46 (12), 4246 (1994)
6. Lux, B., Colombier, C., Altena, H., Stjernberg, K., Thin Solid Films 138, 4964 (1986)
7. Fredriksson, E., Carlsson, J., J. Chem. Vap. Dep. 1, 333417 (1993)
8. Smithells Metals Reference Book, edited by Brandes, E.A. (Butterworth & Co, 1983) p.2271
9. Kodas, T., Hampden-Smith, M., The Chemistry of Metal CVD, (VCH Weinhem, 1994) p. 437;
Smithells Metals Reference Book, edited by Brandes, E.A. (Butterworth & Co, 1983), pp. 484488
10. Colombier, C., Peng, J., Altena, H., Lux, B., Int. J. of Ref. and Hard Mat. 5 (2), 8287 (1986)
11. Ajayi, O.B., Akani, M.S., Lambi, J.N., Burrows, H.D., Osasona, O., Podor, B., Thin Solid Films 138, 9195 (1986)
12. Ajayi, O.B., Akani, M.S., Lambi, J.N., Jeynes, C., Watts, J.F., Thin Solid Films 185, 123136 (1990)
13. Kofstad, P., High Temperature Corrosion, (Elsevier Applied Science, England, 1988) p. 408

MOCVD of Aluminum Oxide Barrier Coating

  • Jun C. Nable (a1), Malgorzata A. Gulbinska (a1), Steven L. Suib (a1) (a2) and Francis S. Galasso (a1)

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