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MOCVD Growth and Structure of PbTiO3 Thin Films

  • Y. Gao (a1), G. Bai (a2), K. L. Merkle (a2), H. L. M. Chang (a2) and D. J. Lam (a2)...

Abstract

PbTiO3 thin films grown on (001)MgO and (110)MgO by MOCVD have been characterized by x-ray diffraction and transmission electron microscopy. The PbTiO3 films deposited on (001)MgO under the optimum conditions always show a bi-layer structure. The top layer of the films near the free surface is c-axis oriented with the orientation relationship (001)[100]PbTiO3∥(001)[100]MgO. The bottom layer of the films near the substrate is a-axis oriented with (100)[001]PbTiO3∥(001)[100]MgO. 90° domains were observed, but only in the caxis oriented layers. The thickness of the a-axis oriented layers near the substrate decreases with decreasing the cooling rate. PbTiO3 films deposited on (110) MgO, however, are single-layer, epitaxial films with (101)[001]PbTiO3∥(110)[001]MgO.

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