Skip to main content Accessibility help

Microwave CVD of Diamond Using Methanol-Rare Gas Mixtures

  • M. Buck (a1), T. J. chuang (a1), J. H Kaufman (a1) and H. Seki (a1)


The deposition of diamond from a reactive vapor phase has been dominated by the use of very dilute gas mixtures of hydrocarbon molecules, usually methane, in hydrogen. Recently there have been reports using nitrogen and oxygen containing simple organics such as amines and alcohols which seem promising. The role of atoms other than hydrogen is still not very clear. There is need for more experimental data to further our understanding in this regard. Here we give a preliminary report on our investigation of deposition from methanol-rare gas mixtures using a small microwave reactor. An important result is that good diamond can be deposited from methanol without addition of hydrogen gas and the quality of the crystallites can be influenced by Ar in the plasma.



Hide All
1. Angus, J.C., Will, H.A. and Stanko, W.S., J. Appl. Phys., 39, 2915 (1968).
2. Angus, J.C., Gardner, N.C., Poferl, D.J., Chauhan, S.P., Dyble, T. and Sung, Pai, in: Sinteticheskiye Almazy v Promyshlennosti, Ed. Bakul, V.N. (Naukova Dumka, Kiev, 1974)
3. Spitsyn, B. V., Bouilov, L. L. and Derjaguin, B. V., J. Cryst. Growth, 52, 219 (1981).
4. Matsumoto, S., Sato, Y., Tsutsumi, M. and Setaka, N., J. Material Sci., 17, 3106 (1982).
5. Kamo, M., Sato, Y., Matsumoto, S. and Setaka, N., J. Cryst. Growth, 62, 642 (1983).
6. Angus, J. C. and Hayman, C. C., Science, 241, 915 (1988).
7. Bachmann, P.K. and Messier, R., C and EN, 67(20), 24 (1989).
8. Hirose, Y. and Teresawa, Y., Jap. J. Appl. Phys., 25, L519 (1986).
9. Chang, C.P., Flamm, D. L., Ibbotson, D. E. and Mucha, I.A., J. Appl. Phys., 63 1744 (1988).
10. Watanabe, I. and Sugata, K., Jap. J. Appl.Phys., 27, 1397 (1988); I. Watanabe and K. Sugata, lap. J. Appl. Phys., 27, 1808 (1988);
11. Akatsuka, F., Hirose, Y. and Komaki, K, Jap..Appl. Phys., 27, L1600 (1988) 1% ethanol, 19% Ar, 80% hydrogen in Arc discharge
12. Matsui, Y. and Sahara, M., Jap. J, Appl. Phys., 28, 1023 (1989).
13. Inspector, A., Liou, Y., McKenna, T. and Messier, R., Int. Coqf Metal. Coatings, April (1989), Surface and Coating Technology, in press.
14. Saito, Y., Sato, K., Tanaka, H., Fujita, K. and Matuda, S.,.J. Mater. Sci., 23, 842 (1988);
15. Kawato, T. and Kondo, K., Jap. Appl. Phys., 26, 1429 (1987).
16. Itoh, T., Kazahaya, T., Miyama, M., Daimon, M., Masuda, A., Etoh, Y., Abstracts: Spring Meeting JSAP, 881105–02, 441 (1988).
17. Suzuki, J., Kawarada, H., Mar, K.S., Wei, J., Yokota, Y. and Iliraki, A., Int. Conf. New Diamond Sci. Technol., 1P2-06 (1988); Jap. J. Appl. Phys., 28,L281 (1989).
18. Ishibori, K. and Ohira, Y., Int. Conf. New Diamond Sci. Technol., P2-07 (1988).
19. Toshima, H., Kotaki, T., Yaguchi, Y., Amada, Y. and Matsumoto, O., Int Conf New Diamond Sci. Technol., P2-10 (1988).
20. Ito, T., Masuda, A., Eto, Y., Ito, K. and Nishimoto, K., Int. Conf. New Diamond Sci, Technol., P2-16 (1988).
21. Hirose, Y., Takahasi, K., Iwasaki, K, Komaki, K and Fujimaki, T.,. Jpn. Soc. Appl. Phys. Spring Meeting, 29a-T-4 (1988).
22. Hirose, Y., Int. Conf. New Diamond Sci. Technol., 1–09 (1988).
23. Tanabe, T., Nishibayashi, Y., Imai, T., lkegaya, A. and Fujimori, N., Int. Conf. New Diamond Sci. Technol., 1–13 (1988).
24. Saito, Y., Sato, K., Tanaka, H. and Miyadera, H., J. Mater. Sci., 24, 293 (1989).
25. Mucha, J.A., Flamm, D. L., and Ibbotson, D. E.,. J. Appl. P1hys.,65 3448 (1989).
26. Meiners, L. G. and Alford, D. B., Rev. Sci. Instr., 57, 164 (1986).
27. Asmussen, J., Mallavarpu, R., Hamann, J.R. and lI.Park, C., IE!EE Proc., 62, 109 (1974).
28. Knight, D. S. and White, W. B., Mater. Res., 4, 385 (1989).
29. Rosner, D.E.,in “Annual Rev. of Mat. Sci.”, 2, 573 (1973).
30. Rony, P.R. and Hanson, D.N., J. Chem. Phys., 44, 2536 (1966)
31. Hsu, W.L., J. Vac. Sci. Technol., A 7, 1047 (1989).
32. Coburn, J.W. and Winters, H.F., J. Appl. Phys., 50, 3189 (1979).
33. Matumoto, O., Toshima, H. and Kanzaki, Y., Thin Solid Films, 128, 341 (1985).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed