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Microwave Assisted Chemical Vapor Infiltration

  • D. J. Devlin (a1), R. P. Currier (a1), R. S. Barbero (a1), B. F. Espinoza (a1) and N. Elliott (a1)...


A microwave assisted process for production of continuous fiber reinforced ceramic matrix composites is described. A simple apparatus combining a chemical vapor infiltration reactor with a conventional 700 W multimode oven is described. Microwave induced inverted thermal gradients are exploited with the ultimate goal of reducing processing times on complex shapes. Thermal gradients in stacks of SiC (Nicalon) cloths have been measured using optical thermometry. Initial results on the “inside out” deposition of SiC via decomposition of methyltrichlorosilane in hydrogen are presented. Several key processing issues are identified and discussed.



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1. Besmann, T.M., Sheldon, B.W., Lowden, R.A.and Stinton, D.P. Science 253: 1104 (1991).
2. Gupta, D.and Evans, J.W., J. Mater. Res. 6(4): 810 (1991).
3. Motojima, S. and Hasegawa, M., Thin Solid Films 186: L39 (1990).
4. Pohl, R.G. in Silicon Carbide: A High Temperature Semiconductor. Proc. Conf. on Silicon Carbide. O'Conner, Smiltens, J.R. and, J., Eds., p. 318, Pergamon Press. Boston, (1960).
5. Sugiyama, K. and Nakamura, T., J. Mater. Sci. Letters 6: 331 (1987).\


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