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Microstructure of Sputter Deposited TiO2/SiO2 Multilayer Optical Coatings

  • E. Sutter (a1), P. Sutter (a1) and J.J. Moore (a2)

Abstract

The microstructure of TiO2/SiO2 multilayer optical filters has been investigated in detail by cross-sectional transmission electron microscopy and related to their optical properties and stability. The amorphous TiO2 layers in the as-deposited multilayers are found to consist of nanocolumns and intercolumnar regions with non-stoichiometric or lower density material. In humid ambients this microstructure absorbs moisture which causes a shift in the absorption edge of the filters. Upon annealing the TiO2layers are found to recrystallize into the low-temperature anatase modification which leads to significantly improved stability of the optical properties of the filters.

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Microstructure of Sputter Deposited TiO2/SiO2 Multilayer Optical Coatings

  • E. Sutter (a1), P. Sutter (a1) and J.J. Moore (a2)

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