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The Microstructure of Fe7C3 Formed at 300°C by Plasma Enhanced Chemical Vapor Deposition (PECVD)

Published online by Cambridge University Press:  03 September 2012

H. Siriwardane ,
P. Fraundorf ,
J.W. Newkirk ,
O.A. Pringle  and
W.J. James
H. Siriwardane
Affiliation:
Departments of Physics, University of Missouri-Rolla, Rolla, MO 65401 (U.S.A.).
P. Fraundorf
Affiliation:
Department of Physics, University of Missouri-St. Louis, St. Louis, MO 63121 (U.S.A.).
J.W. Newkirk
Affiliation:
Departments of Metallurgical Engineering, and University of Missouri-Rolla, Rolla, MO 65401 (U.S.A.).
O.A. Pringle
Affiliation:
Departments of Physics, University of Missouri-Rolla, Rolla, MO 65401 (U.S.A.).
W.J. James
Affiliation:
Departments of Chemistry and the Graduate Center for Material Research, University of Missouri-Rolla, Rolla, MO 65401 (U.S.A.).
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Extract

Thin iron carbide films were prepared by introducing iron penta carbonyl (FeCO5) and hydrogen (H2) into a glow discharge. The films are of potential interest in corrosion and wear resistant applications. X-ray diffraction data of films (≈ 7000 Å thick) deposited on glass at 300°C evidenced only Fe7C3. Thinner films were required for examination by analytical and high resolution transmission electron Microscopy. Therefore, two sets of films (“thin” < 200 Å and “thick” ≈ 800 Å) were plasma-deposited on carbon or holey carbon films supported on copper grids. The thin TEM specimens exhibited a fine texture and gave rise to ring diffraction patterns, whereas the thick TEM specimens evidenced two types of structure: (i) half-Micron sized grains separated from one another by 1–2 Microns on the support, although sometimes interconnected by single crystal platelets and (ii) 300 Å grapelike clumps of 100–200 Å crystals, each individually surrounded by a 50 Å non-crystalline coating. The latter structure may result from a post-formation oxidation process which expels carbon from the iron phase into grain boundaries.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 313: Symposium Q1 – Magnetic Ultrathin Films, Multilayers and Surfaces/Magnetic Interfaces-Physics and Characterizations , 1993 , 691
Copyright
Copyright © Materials Research Society 1993

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References

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