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Microstructure of BaTiO3 Thin Films Grown by Reduced-Pressure CVD

  • Peter C. Van Buskirk (a1), Robin Gardiner (a1) and Peter S Kirlin (a1)

Abstract

Polcrystalline BaTiO3 films have been grown on NdGaO3 [100], SrTiO3 [100] and Si [100] substrates by reduced pressure CVD. The substrate temperature was 1000°C and the total pressure during growth was 4 torr. X-ray diffraction measurements indicate highly textured films on the NdGa03 substrate. The orientation was predominantly [100], accompanied by small quantities of various TiO crystalline phases.

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1 Landolt-Bornstein Numerical Data and Functional Relationships in Science and Technology. New Series, III/11, Hellwege, K.H., ed., pp. 682, 685 (1979)
2 “Desirability of electro-optic materials for guided-wave optics”, Holman, R.L., Johnson, L.M., Skinner, D.P., Optical Eng., 26(2), pp. 134142 (1987)
3 “Preparation and Properties of Thin Barium Titanate Films”, Feuersanger, A.E., J. Electrochem. Soc, 111(12), pp. 13871391, (1964)
4 “Electrical properties of flash evaporated BaTi03 thin films”, Slack, J.R., Burfoot, J.C., J. Phys. C: Solid State Physics, 4, pp. 898909 (1971)
5 “Preparation of ferroelectric BaTiO3 thin films by activated reactive evaporation”, Iijima, K., Terashima, T., et. al., Applied Physics Letters, 56(6), pp. 527529, (1990)
6 “Structural and electrical properties of rf-sputtered amorphous barium titanate thin films”, Sreenivas, K., Mansingh, A., sayer, M., J. Appl. Phys. 62(11), pp. 44764481 (1987)
7 “Growth of BaTiO3-SrTiO3 thin films by R.F. magnetron sputtering”, Fujimoto, K., Kobayashi, Y., Kubota, K., Thin Solid Films 169, pp. 249256 (1989)
8 “Pulsed laser deposition of barium titanate films on silicon”, Nawathey, R., et. al., Solid State Comm., 71(1), pp. 912 (1989)
9 “Epitaxial growth of BaTiO3 thin films using laser ablation”, Davis, G.M., Gower, M.C., Applied Physics Letters, 55(2), pp. 112114, (1989)
10 “CVD in Stagnation Point Flow”, Houtman, D.B., Graves, D.B., Jensen, K.F., J. Electrochemical Soc, 133, pp. 961 (1986)
11 “Low Pressure MOCVD of c-axis oriented BiSrCaCuO Thin Films”; Hamaguchi, N., Vigil, J., Gardiner, R., Kirlin, P.S., Jpn. J. Appl. Phys., 29(4), pp. L596599 (1990)
12 “Epitaxial films of YBaCuO7-x on NdGaO3, LaGaO3, and SrTiO3 substrates by laser ablation.” Koren, G. et al., Appl. Phvs. Lett. 1989, 54, 1054.
13 “JCPDS Powder Diffraction File, Int. Center for Diffraction Data, 1982

Microstructure of BaTiO3 Thin Films Grown by Reduced-Pressure CVD

  • Peter C. Van Buskirk (a1), Robin Gardiner (a1) and Peter S Kirlin (a1)

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