Skip to main content Accessibility help

The Microstructure and Wear Behavior of Cr- and W-DLC Coatings Sputter-Deposited onto AISI 52100 Substrates as Elucidated using Focused-Ion-Beam SEM

  • Clark V. Cooper (a1), Rizhi Wang (a2), Hyung K. Yoon (a3) and Mahmoud A. Taher (a3)


Magnetron sputtering has been used to deposit metal-containing, diamond-like-carbon (Me-DLC) coatings onto substrates composed of AISI 52100 steel in quenched-and-tempered condition. Coatings of two distinctly different compositions, one containing Was the metallic constituent and the second containing Cr, have been deposited in a plasma containing Ar and C2H2.Interrupted, unidirectional sliding experiments of the block-on-ring type have been conducted in a poly-alpha-olefin (PAO) lubricant at a load of 667 N for discrete numbers of cycles, N, of between 10 and 1000. Focused-ion-beam, scanning electron microscopy (FIB/SEM) has been applied to characterize the morphology of as-deposited and worn Me-DLC coatings. This technique has resulted in the determination that the Cr-DLC coating, deposited using the investigated processing parameters, fractures in a brittle manner through the formation and propagation of “tunnel cracks,” which unzip in a direction parallel to the grinding direction outside of the region of contact. Conversely, the application of specific processing parameters to deposit W-DLC produces a coating that wears by gradual recession, consistent with polishing wear. First-principles-based analysis shows that the state of residual stress is critically important in the behavior of the coating.



Hide All
1. Dimigen, H., Hubsch, H., and Memming, R., Appl. Phys. Lett. 50, 1056 (1987).
2. Lee, K. R., Eun, K. Y., and Kim, K. M., Surf. Coat. Technol. 77, 786 (1995).
3. Voevodin, A. A., Prasad, S. V., and Zabinski, J. S., J. Appl. Phys. 82, 855 (1997).
4. Donnet, C., Surf. Coat. Technol. 101, 180 (1998).
5. Grill, A., Diamond-like carbon: state of the art, Diamond Relat. Mater. 8, 428 (1999).
6. Cui, F. Z. and Li, D.J., Surf. Coat. Technol. 131, 481 (2000).
7. Wei, R., Wilbur, P. J., and Liston, M. J., Diamond Relat. Mater. 2, 898 (1993).
8. Grill, A., Surf. Coat. Technol. 94–95, 507 (1997).
9. Heimberg, J. A., Wahl, K. J., Singer, I. L., and Erdemir, A., Appl. Phys. Lett. 78, 2449 (2001).
10. Gille, G. and Rau, B., Thin Solid Films 120, 109 (1984).
11. Nir, D., Thin Solid Films 112, 41 (1984).
12. Seth, J., Padiyath, R., and Babu, S. V., J. Vac. Sci. Technol. A 10, 284 (1992).
13. Thomsen, N. B., Fischer-Cripps, A. C., and Swain, M. V., Thin Solid Films 332, 180 (1998).
14. Peng, X. L. and Clyne, T. W., Thin Solid Films 312, 219 (1998).
15. Wang, J. S., Sugimura, Y., Evans, A. G., and Tredway, W. K., Thin Solid Films 325, 163 (1998).
16. Harris, S. J. and Weiner, A. M., Wear 223, 31 (1998).
17. Meng, W. J. and Gillispie, B. A., J. Appl. Phys. 84, 4314 (1998).
18. Bewilogua, K., Cooper, C. V., Specht, C., Schroder, J., Wittorf, R., and Grischke, M., Surf. Coat. Technol. 127, 224 (2000).
19. Cao, D. M., Feng, B., Meng, W. J., Rehn, L. E., Baldo, P. M., and Khonsari, M. M., Appl. Phys. Lett. 79, 329 (2001).
20. Dimigen, H. and Klages, C.-P., Surf. Coat. Technol. 49, 543 (1991).
21. Moon, M. Y., Wang, R., and Evans, A. G., unpublished research (2001).
22. Standard test method for ranking resistance of materials to sliding wear using block-on-ring wear test, ASTM Standard G 77-98, in 1999 Annual Book of ASTM Standards, Volume 03.02, ASTM, West Conshohocken, PA, 1999, pp. 318331.
23. Cho, S., Lee, K., Eun, K. Y., Hahn, J. H., and Ko, D., Thin Solid Films 341, 207 (1999).
24. Cooper, C. V., Beetz, C. P. Jr, Buchholtz, B. W., Wilbur, P. J., andWei, R., Diamond Relat. Mater. 3, 534 (1994).
25. Cooper, C. V., Holiday, P., and Matthews, A., Surf. Coat. Technol. 63, 129 (1994).
26. Wang, R., Mercer, C., Evans, A. G., Cooper, C. V., and Yoon, H. K., submitted to Diamond Relat. Mater.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed