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Microstructure and Phase Characterization of the Surface of a-C:H Films by Means of Scanning Tunneling Microscopy and Spectroscopy

Published online by Cambridge University Press:  10 February 2011

I. Rusman ,
L. Klibanov ,
E. Ben-Jacob  and
N. Croitoru
I. Rusman
Affiliation:
Departiment of Physics and Astronomy, ira@albert.tau.ac.il
L. Klibanov
Affiliation:
Department of Electrical Engineering and Physical Electronics, Tel-Aviv University, POB 39040, Ramat-Aviv 69978, Israel
E. Ben-Jacob
Affiliation:
Departiment of Physics and Astronomy, ira@albert.tau.ac.il
N. Croitoru
Affiliation:
Department of Electrical Engineering and Physical Electronics, Tel-Aviv University, POB 39040, Ramat-Aviv 69978, Israel
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Abstract

Scanning Tunneling Microscopy and Spectroscopy (STM/STS) are used for obtaining nano-scale information on morphological and electronic properties of the surface of diamond-like amorphous hydrogenated carbon (a-C:H) filns. The films are prepared by rf plasma decomposition of methane CH4.A two phase model of a-C:H is suggested - sp3 bonded matrix in which sp2 clusters are embedded. A novel method of mapping graphite-like clusters over a-C:H surface is proposed. Tunneling I/V characteristics with a gap acquired on indium tin oxide (ITO) deposited on a-C:H indicate location of sp2 regions at the surface of a-C:H below an ITO overlayer

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 411: Symposium T – Electricaly-Based Microstructural Characterization , 1995 , 197
Copyright
Copyright © Materials Research Society 1996

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References

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