Skip to main content Accessibility help
×
Home

The Microstructure and Nanoindentation Behaviour of TiN/NbN Multilayers

  • J. M. Molina-Aldareguia (a1), S. J. Lloyd (a1), Z. H. Barber (a1), M. G. Blamire (a1) and W. J. Clegg (a1)...

Abstract

TiN/NbN multilayers and TiN monolithic films have been grown by UHV reactive magnetron sputter deposition on MgO single crystals. The hardness has been measured by nanoindentation and the as-deposited and deformed structures studied in cross-section using transmission electron microscopy. It has been found that initially the multilayers grow epitaxially with the substrate. However, once the overall film thickness has reached ∼300 nm, epitaxial growth ceases. No increase in hardness with respect to monolithic films of the multilayer components is observed in these multilayers. Experiments on monolithic films of TiN show that the same loss of epitaxy occurs, leading to a reduction in the hardness of the films, and that this change in growth morphology is triggered by the internal stresses induced within the films during deposition.

Copyright

References

Hide All
1. Barnett, S.A. and Shinn, M., Annu. Rev. Matter. Sci., 24, p. 481 (1994)
2. Chu, X. and Barnett, S.A., J. Appl. Physics, 77(9), p. 4403 (1995)
3. Barber, Z. H., Tricker, D.M., and Blamire, M.G., IEEE Trans. Appl. Supercon., 5, p. 2314 (1995)
4. Oliver, W. C. and Pharr, G.M., J. Mater. Research, 7(6), p. 1564 (1992)
5. Lloyd, S. J., Pitchford, J. E., Molina-Aldareguia, J.M., Barber, Z. H., Blamire, M. G. and Clegg, W.°J.°, Microsc. Microanal. 5 (Suppl 2), p. 776 (1999).
6. 1997 JCPDS-InternationalC entref or Diffraction Data PCPDFWIN. 1997.
7. Nix, W. D., Metallurgical Transactions A, 20, p. 2217 (1989)
8. Kim, J. O., Achembach, J. D., Mirkarimi, P. B., Shin, M. and Barnett, S. A.., J. Appl. Physics, 72(5), p. 1805 (1992)
9. Greene, J. E., Sundgren, J.-E., Hultman, L., Petrov, I. and Bergstrom, D. B., Appl. Phys. Lett., 67(20), p. 2928 (1995)
10. Oh, U. C., Je, J.H. and Lee, J.Y., J. Mater. Res., 10(3), p. 634 (1995)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed