Hostname: page-component-848d4c4894-4rdrl Total loading time: 0 Render date: 2024-06-24T13:06:34.000Z Has data issue: false hasContentIssue false
  • English
  • Français

Microstructure and Mechanical Properties of Plasma Assisted CVD Ti(C,N) Films as a Function of Carbon Content

Published online by Cambridge University Press:  15 February 2011

K. W. Xu ,
H. L. Sun ,
N. S. Hu  and
B. C. Hendrix
K. W. Xu
Affiliation:
State Key Laboratory for Mechanical Behaviour of Materials, Xi'an Jiaotong University, 710049, Xi'an, China, jwhe@xjtu.edu.cn
H. L. Sun
Affiliation:
State Key Laboratory for Mechanical Behaviour of Materials, Xi'an Jiaotong University, 710049, Xi'an, China, jwhe@xjtu.edu.cn
N. S. Hu
Affiliation:
State Key Laboratory for Mechanical Behaviour of Materials, Xi'an Jiaotong University, 710049, Xi'an, China, jwhe@xjtu.edu.cn
B. C. Hendrix
Affiliation:
State Key Laboratory for Mechanical Behaviour of Materials, Xi'an Jiaotong University, 710049, Xi'an, China, jwhe@xjtu.edu.cn
Get access

Abstract

The results show that unlike those made by physical vapour deposition, Ti(C,N) coatings made by plasma assisted chemical vapour deposition are composed of two phases, TiN and TiC. With the formation of two phases, the columnar structure vanishes gradually and the crystal size becomes small. The carbon content is the dominant controlling factor for a linear increase in microhardness of the coatings, but the residual macrostress and the adhesive strength evaluated under cyclic contact conditions are dependent to a great extent on the percentage of the two phases. There is an intermediate carbon content for the present Ti(C,N) coatings which yields a fine mixed microstructure and optimum mechanical properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 277
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Chen, H., Yi, M.Z., Xu, K.W. and He, J.W., Surf. & Coat. Technol. 74/75, 253 (1995).Google Scholar
2. Vingsbo, O., Hogmark, S., Joensson, B. and Ingemarsson, A., in ASTM STP 889, 257 (1984).Google Scholar
3. He, J.W., Hendrix, B.C., Hu, N.S., Xu, K.W., Bell, T., Sun, Y. and Mao, K., Surf. Engng, to be published (1996).Google Scholar
4. Li, S.Z., Shi, Y.L., Xu, X. and Zhao, C., Chin. J. of Thin Film Sci. & Technol. 2(2), 70 (1989).Google Scholar
5. Tamura, M., Kubo, H., Surf. & Coat. Technol. 49, 194 (1991).Google Scholar
6. He, J.W., Hendrix, B.C., Yi, M.Z. and Hu, N.S., MRS Proc. Vol.365, 881 (1994)Google Scholar
7. Holleck, H., Surf. Engng, 7(2) 137 (1991).Google Scholar
8. Xu, K.W., Gao, R. S., Chen, J. and He, J.W., Surf. & Coat. Technol. 58, 37 (1993).Google Scholar
9. Holleck, H.: J Vac. Sci. & Technol. A4(6), 2661 (1986).Google Scholar