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Microstructural characterization of porous thin films
Published online by Cambridge University Press: 11 February 2011
Abstract
A preliminary TEM investigation of porous films fabricated by glancing angle deposition has shown the importance of surface diffusion and crystal structure in determining the final microstructure of the film. Although the process variables are extremely important in defining the morphology of the film, their effects are limited in terms of final microstructure.
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- Copyright © Materials Research Society 2003
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