Skip to main content Accessibility help
×
Home

Microstructural Characterization of High Dose Oxygen Implanted Silicon

  • J. L. Batstone (a1), Alice E. White (a1), K. T. Short (a1), J. M. Gibson (a1) and D. C. Jacobson (a1)...

Abstract

The microstructure of oxygen implanted silicon for use in silicon-on- insulator technology has been examined by transmission electron microscopy. A variety of buried oxide layers prepared using oxygen doses below and above that required for stoichiometric SiO2 formation have been studied. High resolution imaging in crosssection has revealed exceptionally flat Si-SiO2 interfaces, comparable to the best thermally grown Si-SiO2 interfaces. Examination of as-implanted material shows a complex interwoven crystalline/amorphous structure which evolves during high temperature (1350–1400° C) annealing into a buried oxide layer.

Copyright

References

Hide All
[1] Hemment, P.L.F., Mat. Res. Soc. Symp. Proc, 53, 207 (1986) and references therein.
[2] Celler, G.K., Hemment, P.L.F., West, K.W. and Gibson, J.M., App. Phys. Lett. 48, 532 (1986)
[3] Alice White, E., Short, K.T., Batstone, J.L., Jacobson, D.C., Poate, J.M. and West, K.W., Proc. Ion Beam Modif. Mat. Catania (1986), App. Phys. Lett. 5, (1987) To be published 5 th Jan
[4] Celler, G.K., Batstone, J.L., West, K.W., Hemment, P.L.F. and Reeson, K.J., Proc. European MRS Strasbourg (1986) To be published.
[5] Alice White, E., Short, K.T., Pfeiffer, L.N., West, K.W. and Batstone, J.L., These Proc.
[6] Tuppen, C.G., Taylor, M.R., Hemment, P.L.F. and Arrowsmith, R.P., App. Phys. Lett. 45, 57 (1984)
[7] Celler, G.K., Hemment, P.L.F., Reeson, K.J., Kilner, J.A., Chater, R.J., Marsh, C., Booker, G.R. and Stoemenos, J., To be published.
[8] Bourret, A., 13th Int. Conf. on Defects in Semiconductors p.129 (1985) and references therein.
[9] Ponce, F.A., Yamashita, T. and Hahn, S., App. Phys. Lett. 48, 1051 (1983).
[10] Bender, H., Phys. Stat. Sol. (a) 86, 245 (1984)
[11] Batstone, J.L., White, Alice E., Short, K.T. and Gibson, J.M., Proc. 44th Ann. Meeting EMSA, 390 (1986)
[12] Batstone, J.L., Gibson, J.M., Tung, R.T., Levi, A.F.J. and Outten, C.A., Mat. Res. Soc. Symp. Proc. 82, (1987) To be published.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed