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Microstructural Characterization of α-Al2O3 Implanted with Iron

  • P.S. Sklad (a1), J.D. McCallum (a1), S.J. Pennycook (a1), C.J. McHargue (a1), C.W. White (a1) and A. Perez (a2)...


The microstructural and compositional changes produced in the near surface region of single crystals of α-A12O3 by ion-implantation with iron have been investigated by a number of complementary techniques, including Rutherford backscattering spectroscopy (RBS), conversion-electron Mdssbauer spectroscopy (CEMS), analytical electron microscopy (AEM), and scanning transmission electron microscopy (STEM). Iron precipitates, 1 to 3 nm in diameter, have been identified in as-implanted material at depths corresponding to the peak in the deposited iron concentration profile. The same techniques have been used to monitor the redistribution of iron and the corresponding changes in valence state during post-implantation annealing. Electron microscopy has been used to correlate RSB and CEMS results with the microstructural development.



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