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Microstructural Characterisation of Pb(Zr0.52Ti0.48)O3 Thin Films Deposited on RuO2 Electrodes by Laser Ablation

Published online by Cambridge University Press:  10 February 2011

A De Benedittis ,
A. Di Cristoforo ,
P. Mengucci ,
G. Majni ,
A. Diodati ,
F. Leccabue ,
B.E. Watts ,
D. Seuret  and
J. Smeets
A De Benedittis
Affiliation:
INFM-Università di Ancona, Dipartimento di Scienze dei Materiali e della Terra, Via Brecce Bianche, 1–60131 Ancona, Italy
A. Di Cristoforo
Affiliation:
INFM-Università di Ancona, Dipartimento di Scienze dei Materiali e della Terra, Via Brecce Bianche, 1–60131 Ancona, Italy
P. Mengucci
Affiliation:
INFM-Università di Ancona, Dipartimento di Scienze dei Materiali e della Terra, Via Brecce Bianche, 1–60131 Ancona, Italy
G. Majni
Affiliation:
INFM-Università di Ancona, Dipartimento di Scienze dei Materiali e della Terra, Via Brecce Bianche, 1–60131 Ancona, Italy
A. Diodati
Affiliation:
Istituto MASPEC/CNR, Via Chiavari 18a, 1–43 100 Parma, Italy, leccabue@prmasp.bo.cnr.it
F. Leccabue
Affiliation:
Istituto MASPEC/CNR, Via Chiavari 18a, 1–43 100 Parma, Italy, leccabue@prmasp.bo.cnr.it
B.E. Watts
Affiliation:
Istituto MASPEC/CNR, Via Chiavari 18a, 1–43 100 Parma, Italy, leccabue@prmasp.bo.cnr.it
D. Seuret
Affiliation:
Istituto MASPEC/CNR, Via Chiavari 18a, 1–43 100 Parma, Italy, leccabue@prmasp.bo.cnr.it
J. Smeets
Affiliation:
VITO-Materials Division, Boeretang 200, B-2400 Mol, Belgium
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Abstract

An aspect which has hindered the development of ferroelectric memories is dielectric fatigue and to resolve this conducting oxides are promising candidates as an electrode material for lead zirconate titanate thin films. In this work ferroelectric films have been grown by pulsed laser deposition on ruthenium oxide electrodes. The phase distribution, microstructure and the effect of subsequent heat treatment have been studied by grazing angle X ray diffraction and electron microscopy; the results and implications for use of RuO2 as the bottom electrode during vapour phase deposition are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 249
Copyright
Copyright © Materials Research Society 1996

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