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Microscopic Determination of Stress Distribution in Gaas Grown at Low Temperature on GaAs (100)

  • Zuzanna Liliental-Weber (a1), A. Ishikawa (a2), M. Teriauchi (a2) and M. Tanaka (a2)

Abstract

A microscopic strain distribution across commensurate interfaces between GaAs layers grown on semi-insulating GaAs substrates was observed by means of convergent beam electron diffraction (CBED) and large angle convergent beam methods (LACBED). Strain relaxation at a specific distance from the interface was observed in these layers without formation of misfit dislocations. It was proposed that specific point defects distributed close to the interface can explain the asymmetric broadening of high-order Laue zone (HOLZ) lines in the CBED patterns.

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1. Van der Merwe, J.H., J. Appl. Phys. 34, 123 (1962).
2. Matthews, J.W., Mader, S., and Light, T.B., J. Appl. Phys. 41, 3800 (1973).
3. Matthews, J.W. and Blakeslee, A.E., J. Cryst. Growth 27, 118 (1974).
4. Matthews, J.W., J. Vac. Sci. Technol. 12, 126 (1975).
5. People, R. and Bean, J.C., Appl. Phys. Lett. 47, 322 (1985).
6. Dodson, B.W. and Tsao, J.Y., Appl. Phys. Lett. 51, 1325 (1987).
7. Steeds, J.W., in ”Introduction to Analytical Electron Microscopy” Eds. Hren, J.J., Goldstein, J.I. and Joy, D.C. (Plenum, New York and London 1979), ch. 15.
8. Humphreys, C.J., Maher, D.M., Fraser, H.L., and Eaglesham, D.J., Phil. Mag., 58, 787, (1988).
9. Eaglesham, D.J., Maher, D.M., Fraser, H.L., Humphreys, C.J., and Bean, J.C., Appl. Phys. Lett. 54, 222 (1989).
10. Tanaka, M., Saito, R., Ueno, K., and Harada, Y., J. Electron Microsc., 29, 408 (1980).
11. Kaminska, M., Liliental-Weber, Z., Weber, E.R., George, T., Kortright, J.B., Smith, F.W., Tsaur, B.Y., and Calawa, A.R., Appl. Phys. Lett. 54, 1881 (1989).
12. Kaminska, M., Weber, E.R., Liliental-Weber, Z., Leon, R., and Rek, Z., J. Vac. Sci. Technol. B7, 710 (1989).
13. Liliental-Weber, Z., Mat. Res. Soc. Proc. vol. 198, p.371.
14. Liliental-Weber, Z., in: ”Proc. 12th International Congress for Electron Microscopy.” Ed. Bailey, G.W. (San Francisco Press, San Francisco 1990), vol. 4, p. 588.
15. Liliental-Weber, Z., Swider, W., Yu, K.M., Kortright, J.B., Smith, F.W., and Calawa, A.R., Appl. Phys. Lett., subm.f.publ.
16. Fraser, H.L., in: ”Proc. 49th Annual Meeting of the Electron Microscopy Soc. of America.” Ed. Bailey, G.W., (San Francisco Press, San Francisco 1989), p.518.
17. Gibson, J.M., Hull, R., and Bean, J.C., Appl. Phys. Lett. 48, 649 (1985).

Microscopic Determination of Stress Distribution in Gaas Grown at Low Temperature on GaAs (100)

  • Zuzanna Liliental-Weber (a1), A. Ishikawa (a2), M. Teriauchi (a2) and M. Tanaka (a2)

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