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Micro-RBS Analysis of Masklessly Fabricated Structures

  • A. Kinomura (a1), M. Takai (a1), T. Matsuo (a1), M. Satou (a2), M. Kiuchi (a2), K. Fujii (a2) and S. Namba (a1)...

Abstract

Rutherford backscattering (RBS) analysis of small-sized structures, fabricated by laser chemical vapor deposition (LCVD) with a focused laser beam and ion implantation with a focused ion beam (FIB), has been performed by a microprobe with focused 1.5 MeV helium ions. Micro-RBS spectra and RBS-mapping images revealed a local distribution of masklessly deposited Mo layers on GaAs and local doses of masklessly implanted Au atoms in Si.

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1. Ehrlich, D. J. and Tsao, J. Y., J. Vac. Sci. Tech. B1 969, (1983)
2. Shiokawa, T., Kim, P. H., Toyoda, K., Namba, S., Gamo, K., Aihara, R. and Anazawa, N., Jpn. J. Appl. Phys. 24, L566 (1985)
3. Takai, M., Tsuchimoto, J., Nakai, H., Gamo, K. and Namba, S., Jpn. J. Appl. Phys. 23, L852 (1984)10.1143/JJAP.23.L852
4. Gamo, K., Takakura, N., Samoto, N., Shimizu, R. and Namba, S., Jpn. J. Appl. Phys. 23, L293 (1987)10.1143/JJAP.23.L293
5. Principles and Applications of High-Energy Ion Microbeams, edited by Watt, F. and Grime, G. W. (Adam Hilger, Bristol, 1987)
6. Takai, M., Matsunaga, K., Inoue, K., Izumi, M., Gamo, K., Sato, M. and Namba, S., Jpn. J. Appl. Phys. 26, L550 (1987)10.1143/JJAP.26.L550
7. Inoue, K., Takai, M., Matsunaga, K., Izumi, M., Gamo, K., Namba, S. and Satou, M., Nucl. Instrum. and Methods B30, 580 (1988)
8. Kinomura, A., Takai, M., Inoue, K., Matsunaga, K., Izumi, M., Matsuo, T., Gamo, K., Namba, S. and Satou, M., Nucl. Instrum. and Methods B33, 862 (1988)
9. Kinomura, A., Takai, M., Matsuo, T., Ujiie, S., Namba, S., Satou, M., Kiuchi, M., Fujii, K. and Shiokawa, T., in Proc. of the 6th Intern. Conf. on Ion Beam Modification of Materials, edited by Namba, S. (to be published in Nucl. Instrum. and Methods 1989)
10. Kinomura, A., Takai, M., Matsuo, T., Kiuchi, M., Fujii, K., Satou, M. and Namba, S., Jpn. J. Appl. Phys. 27, L1346 (1988)
ll. Takai, M., Inoue, H., Hashizume, Y. and Namba, S. (in preparation)

Micro-RBS Analysis of Masklessly Fabricated Structures

  • A. Kinomura (a1), M. Takai (a1), T. Matsuo (a1), M. Satou (a2), M. Kiuchi (a2), K. Fujii (a2) and S. Namba (a1)...

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