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Microdiffraction Studies of Oxygen in Silicon - A New SiO2 Phase?

  • J. C. H. Spence (a1), N. Long (a2), W. Bergholz (a3), Y. Kim (a1) and M. O'Keeffe (a4)...

Abstract

Evidence for a new microcrystalline precipitate in CZ Si annealed for 256 hrs at 635°C is presented by electron microdiffraction. This may be a precursor phase for the formation of amorphous platelets [9]. Multiple scattering microdiffraction calculations which distinguish the symmetries of two models for the thermal donor are also given.

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[1] Bourret, A., in Proc. 13th Int. Conf. on Defects in Semiconductors, (1984) p. 129 (A.I.M.E., New York).
[2] Ourmazd, A., Schroter, W.and Bourret, A., J. Appl. Phys, 56, p. 1670 (1984).
[3] Henry, P.M., Farmer, J.W., Meese, J.M., Appl. Phys. Letts. In press. (1984).
[4] Cowley, J.M. and Spence, J.C.H., Ultramicroscopy, 3, p. 433 (1979).
[5] Alexander, H., Spence, J.C.H., Shindo, D., Gottschalk, H., Phil. Mag. in press. (1985).
[6] Spence, J.C.H. In: Proc. Ninth, Int. Congr. on Electron Micros. (Canadian Micros. Soc., Toronto) p. 554 (1978).
[7] Bourret, A. and Colliex, C.Trebbia, P. J. Physique 44, L33 (1983).
[8] X-ray Powder Diffraction file. Publication SMA-T6 of the Joint Committee on powder diffraction standards (1601 Park Lane, Swarthmore, Penn, 19081, USA) (1976).
[9] Fraundorf, P., Chiou, H.-D. and Fraundorf, G.K., J. Cryst. Growth (1985) submitted. Also proc. 3rd VLSI Symp. (1985) p. 436 (Electrochem. Soc.).
[10] Bourret, A., Thibault-Desseaux, J., and Seidman, D.N., J. Appl. Phys. 55, p. 825 (1984).
[11] Yamamoto, N., Spence, J.C.H. and Fathy, D., Phil. Mag. B 49, p. 609 (1984).
[12] O, Keefe, M. and Hyde, B.G., Acta Cryst. B32, p. 2923 (1976).

Microdiffraction Studies of Oxygen in Silicon - A New SiO2 Phase?

  • J. C. H. Spence (a1), N. Long (a2), W. Bergholz (a3), Y. Kim (a1) and M. O'Keeffe (a4)...

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