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Microdiffraction from Cleaved Si-Si1-xGex Multilayers

Published online by Cambridge University Press:  28 February 2011

W. T. Pike
W. T. Pike*
Affiliation:
Cavendish Laboratory, Madingley Road, Cambridge, UK, CB2 OHE
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Abstract

Using the nanometer probe available in the dedicated scanning transmission electron microscope (STEM) local structural information can be obtained from individual layers in [100] grown Si-Si1-xGex multilayer structures. Furthermore the small probe size enables cleaved specimens with their very large wedge angles to be analyzed in cross-section. Diffraction patterns are shown from multilayers of varying periodicity. Analysis of the patterns concentrates on the higher order Laue zone (holz) reflections in the high angle excess ring . The behaviour of the excess holz reflections indicates the transition from a strained layer superiattice to a dislocated structure as the thickness of the layers increases for a given composition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 160 , 1989 , 111
Copyright
Copyright © Materials Research Society 1990

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References

1Maher, D.M., Fraser, H.L., Humphreys, C.J., Knoell, R.V., Bean, J.C., Appl. Phys. Lett. 50, 574 (1987).Google Scholar
2People, R., Bean, J.C.Appl. Phys. Lett. 47, 327 (1985).Google Scholar
3Rodenburg, J.M., McMullan, D.J. Phys. E 18, 949 (1985).Google Scholar
4Crawford, B.J., Lilley, C.R.W., J. Phys. E 3, 462 (1970).Google Scholar
5Gibson, J.M., Hull, R., Bean, J.C., Treacy, M.M.J., Appl. Phys. Lett., 46, 649 (1985).Google Scholar
6Pike, W.T., Brown, L.M., Inst. Phys. Conf. Ser. 100, 69 (1989).Google Scholar
7Fiory, A.T., Feldman, L.C., Bean, J.C., Robinson, I.K., Appl. Phys. Lett., 56, 1227 (1985).Google Scholar
8Hirsch, P.B., Howie, A., Whelan, M.J., Phil. Trans. Roy. Soc. A252, 499 (1960).Google Scholar
9Bean, J.C., Feldman, L.C., Fiory, A.T., Nakahara, S., Robinson, I.K., J. Vac. Sci.Technol. B 1, 146 (1984).Google Scholar