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Metallurgical Behavior of the Metal-IN-P Systems: Implications for the Design of Contacts to Inp

Published online by Cambridge University Press:  25 February 2011

Suzanne E. Mohney  and
Y. Austin Chang
Suzanne E. Mohney
Affiliation:
Materials Science Program, University of Wisconsin-Madison, 1509University Ave., Madison, WI 53706
Y. Austin Chang
Affiliation:
Materials Science and Engineering Department, University of Wisconsin-Madison, 1509University Ave., Madison, WI 53706
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Abstract

Phase equilibria in the M-In-P (M = transition metal) ternary systems is determined through a combination of thermodynamic calculation and experimentation. Palladium is identified as a particularly attractive metal for contacts to InP. One useful feature of this system for contact design is the occurance of PdχInP ternary phases. Additionally, Pdln is found to be in equilibrium with InP and is identified as a promising contact material to InP because of its high melting point, low resistivity, and favorable properties for processing. Progress in the development of Pdln-based contacts to InP is briefly discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 260: Symposium C – Advanced Metallization and Processing for Semiconductor Devices and Circuits , 1992 , 519
Copyright
Copyright © Materials Research Society 1992

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