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A Metal-Alloy Process for the Formation of Oxide Superconducting Films: Advantages, Problems Substrate Interactions, Buffer Layers
Published online by Cambridge University Press: 28 February 2011
Abstract
Most thin film processes developed for the formation of the new cuprate superconductors involve admixture of oxygen during film growth, followed by a subsequent anneal in O2 at high temperatures in order to form the correct phase. We completely separated the two processes by first depositing a metallic alloy of YBa2Cu3 by DC magnetron sputtering, taking full advantage of the ease of calibration and high rates of deposition typical of metals, and then performing a second oxidation and annealing step in an Oo furnace. A potential problem of the attack by ambient moisture on the highly reactive metallic alloy was handled by use of thin Y overlayers. We examined substrate interactions of our films and identified several favorable combinations of substrates and protective buffer layers, such as ZrO2 /Ag and MgO/Nb.
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- Copyright © Materials Research Society 1988
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