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Metal Oxide Films from Carboxylate Precursors

  • W. W. Davison (a1), S. G. Shyu (a1), R. D. Roseman (a1) and R. C. Buchanan (a1)


ZrO2 and Ba2YCU3O7−x metal oxide films were prepared from carboxylate precursors. The zirconia films were prepared from Zr octoate and the Ba-Y-Cu-0 compound synthesized from a mixture of the metal neodeca-noates. Dense, adherent ZrO2 films were obtained on Si. Dense, superconducting Ba-Y-Cu-0 films were also fabricated utilizing the octoate-derived ZrO2 as a bonding surface and diffusion buffer



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Gupta, S. K. and Chin, R. L. in Microelectronics Processing: Inorganic Materials Characterization, ACS Symp. 295 350 (1986).
2. Chandhari, P., LeGoues, F. K., and Segmuller, A., Science 238 342344 (1987).
3. Brinker, C. J., Drotning, W. D., and Scherer, G. W., Mat. Res. Soc. Symp. Proc. 32 2532 (1984).
4. Chiang, Y.- M., Furcone, S. L., Ireda, J. A. S., and Rudman, D. A., to be published in Mat. Res. Soc. Symp. Proc. 99
5. Fefer, M. and Lauer, A. J., J.Amer. Oil Chem. Soc. 43 469470 (1966).
6. Vest, R. W. and Vest, G. W., Annual Rept., U. S.Navy Contr. No. N00014–83-K 0321, 29 Apr. 1985.
7. Davison, W. W. and Buchanan, R. C., to be published in Advances in Ceramics, Ceramic Substrates and Packages.
8. Bradley, D.C, Mehrotra, R.C, Swanwidk, J. D., and Wardlaw, W., J. Chem. 2025–2030 (1966).
9. Davison, W. W., Shyu, S. G., and Buchanan, R. C, to be published in Mat. Res. Symp. Proc. 99.


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