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Metal Oxide Films from Carboxylate Precursors

Published online by Cambridge University Press:  25 February 2011

W. W. Davison ,
S. G. Shyu ,
R. D. Roseman  and
R. C. Buchanan
W. W. Davison
Affiliation:
Department of Materials Science and Engineering, University of Illinoisat Urbana-Champaign Urbana. IL 61801–2995
S. G. Shyu
Affiliation:
Department of Materials Science and Engineering, University of Illinoisat Urbana-Champaign Urbana. IL 61801–2995
R. D. Roseman
Affiliation:
Department of Materials Science and Engineering, University of Illinoisat Urbana-Champaign Urbana. IL 61801–2995
R. C. Buchanan
Affiliation:
Department of Materials Science and Engineering, University of Illinoisat Urbana-Champaign Urbana. IL 61801–2995
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Abstract

ZrO2 and Ba2YCU3O7−x metal oxide films were prepared from carboxylate precursors. The zirconia films were prepared from Zr octoate and the Ba-Y-Cu-0 compound synthesized from a mixture of the metal neodeca-noates. Dense, adherent ZrO2 films were obtained on Si. Dense, superconducting Ba-Y-Cu-0 films were also fabricated utilizing the octoate-derived ZrO2 as a bonding surface and diffusion buffer

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 121: Symposium H – Better Ceramics Through Chemistry III , 1988 , 797
Copyright
Copyright © Materials Research Society 1988

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References

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