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Mechanisms of cross-talk in large area a-Si:H continuous image sensors

  • M. Mulato, J. P. Lu (a1), S. E. Ready (a1), K. Van Schuylenbergh (a1), J. Ho (a1), R. Lau (a1), J. B. Boyce (a1) and R. A. Street (a1)...


We report studies of the image-blur effects caused by lateral cross-talk between neighboring pixels of large-area amorphous silicon (a-Si:H) image sensors. The lateral conduction is attributed to three effects: conduction along the interface between the a-Si:H film and the underlying passivation; field-dependent electron injection at the edge of the sensor; and a field enhancement of the interface conduction due to the bias applied to the address lines. We show that the cross-talk can be controlled by choice of the operating conditions and optimization of the materials.



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[1] Mulato, M., Lemmi, F., Lau, R., Lu, J. P., Ho, J., Ready, S. E., Rahn, J. T., and Street, R. A., The Physics of Medical Imaging, Proc. SPIE, Vol. 3977, 26 (2000).
[2] Street, R.A., “Large Area Image Sensor Arrays”, in Technology and Applications of Amorphous Silicon, Editor Street, R.A., Springer Series in Materials Science 37, Springer-Verlag, Berlin, 2000, chapter 4, p.147.
[3] Rahn, J.T., Lemmi, F., Mei, P., Lu, J.P., Boyce, J.B., Street, R.A., Apte, R.B., Ready, S.E., Schuylenbergh, K.F. Van, Nylen, P., Ho, J., Fulks, R.T., Lau, R., and Weisfield, R., Mat. Res. Soc. Symp. Proc. Vol. 557, 809 (1999).
[4] Lemmi, F., Rahn, J.T., and Street, R.A., Proc. 18th International Conference on Amorphous and Microcrystalline Semiconductors, Snowbird, UT, Aug.1999. J. of Non-Cryst. Solids 266–269, 1203 (2000).10.1016/S0022-3093(99)00925-4
[5] Mulato, M., Lu, J.P. and Street, R., J. of Appl. Physics 89, 638 (2001).10.1063/1.1323529
[6] Mulato, M., Lemmi, F., Ready, S. E., Lu, J. P., Street, R. A., Ho, J., Lau, R. and Boyce, J. B., Mater. Res. Soc. Symp. Proc. (in press).
[7] Rahn, J T., Lemmi, F., Weisfield, R.L., Lujan, R., Mei, P., Lu, J.P., Ho, J., Ready, S.E., Apte, R.B., Nylen, P., Boyce, J., and Street, R.A., The Physics of Medical Imaging, Proc. SPIE 3659, 510 (1999).
[8] Weisfield, R. L., Hartney, M., Schneider, R., Aflatooni, K., and Lujan, R., The Physics of Medical Imaging, Proc. SPIE 3659, 307 (1999).
[9] Mulato, M. et al. , J. of Appl. Physics (in press).


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