Skip to main content Accessibility help

Mechanical-to-Electrical Energy Conversion of Thin-Film Piezoelectric Diaphragms

  • Dylan J Morris (a1), Michelle C Robinson (a2), Leland W Weiss (a3), Cecilia D Richards (a4), Robert F Richards (a5) and David F Bahr (a6)...


A micro (∼1 cm3) dynamic heat engine, capable of producing electrical power from lowgrade heat sources, utilizes a micro-machined diaphragm with a piezoelectric element as a The electromechanical coupling of a piezoelectric diaphragm under large initial stresses and/or large deflections – in the membrane limit – is described here. A simple model is derived for electromechanical transduction of a pressurized piezoelectric membrane and an experiment is described to measure it. Electromechanical coupling initially increases as the square of the center-point deflection as the residual stress is overcome. In the limit of large pressures, the electromechanical coupling approaches a limit that is predicted by the model.



Hide All
1. Demir, I., Olson, A.L., Skinner, J.L., Richards, C.D., Richards, R.F., and Bahr, D.F., Microelectronic Engineering 75, 1223 (2004).
2. Weiss, L.W., Cho, J.H., Morris, D.J., Bahr, D.F., Richards, C.D., and Richards., R.F. Proceedings of ASME IMECE 2006, Chicago, IL. IMECE2006–15042.
3. Sheplak, M. and Dugundji, J., J. App. Mech. 65, 107115 (1998).
4. Tong, P. and Huang, W., J. App. Mech. 69, 785789 (2002).
5. Komargiri, U., Begley, M.R., and Simmonds, J.G., J. App. Mech. 72, 203212 (2005).
6. Cho, J., Anderson, M., Richards, R., Bahr, D., and Richards, C., J. Micromech. Microeng. 15, 17971803 (2005).
7. Wang, Q-M., Du, X-H., Xu, B., and Cross, L.E., IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 46, 638646 (1999).
8. Vlassak, J.J. and Nix, W.D., J. Mat. Res. 7, 32423249 (1992).
9. DiGiovanni, M., Flat and Corrugated Diaphragm Design Handbook, (Marcel Dekker, 1982).
10. Aronov, B., J. Acoust. Soc. Am. 114, 792800 (2003).
11. Robinson, M.C., Morris, D.J., Hayenga, P.D., Cho, J.H., Richards, C.D., Richards, R.F., and Bahr, D.F., Applied Physics A: Materials Science and Processing 85, 135140 (2006).



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed