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Mechanical properties and size effect in nanometric W/Cu multilayers

  • P. Villain (a1), D. Faurie (a1), P.-O. Renault (a1), E. Le Bourhis (a1), P. Goudeau (a1) and K.-F. Badawi (a1)...

Abstract

The mechanixcal behavior of W/Cu multilayers with periods ranging from 24 down to 3 nm prepared by ion beam sputtering was analyzed using a method combining X-ray diffraction and tensile testing, and instrumented indentation. Cracks perpendicular to the tensile axis observed by optical microscopy were generated in the films under the largest applied tensile stresses. These cracks may appear in the multilayer while W layers are still in a compressive stress state. Elastic modulus and hardness values were extracted from nano-indentation data. Crack initiation and elastic constants were observed to depend on the period of these multilayers.

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1. Misra, A. and Kung, H., View point set “deformation and stability of nanoscale metallic multilayers”, Scripta Mat. 50 (2004).
2. Tse, Y.Y., Abadias, G., Michel, A., Tromas, C. and Jaouen, M., Mater. Res. Soc. Symp. Proc. 778, U6.8 (2003)
3. Musil, J., Surf. Coat. Techn. 125, 322 (2000)
4. Haque, M.A. and Saif, M.T.A., Thin Solid Films 484, 364 (2005)
5. Espinosa, H.D., Probok, B.C. and Peng, B., J., mechanics and physics of solids 52, 667 (2004)
6. Hugo, R.C., Kung, H., Weertman, J.R., Mitra, R., Knapp, J.A., Follstaedt, D.M., Acta Mater. 51, 1937 (2003)
7. Villain, P., Goudeau, P., Renault, P.-O. and Badawi, K.F., Appl. Phys. Lett. 81, 4365 (2002)
8. Goudeau, P., Villain, P., Girardeau, T., Renault, P.-O. and Badawi, K.F., Scripta Mat. 50, 723 (2004)
9. Badawi, K.F., Villain, P., Goudeau, P. and Renault, P.-O., Appl. Phys. Lett. 80, 4705 (2002)
10. Noyan, C., Cohen, J.B., Residual stress measurement by diffraction and interpretation. New York, Springer (1987)
11. Hauk, V., Structural and residual stress analysis by non destructive methods: evaluation, application, assessment. Amsterdam, Elsevier (1997)
12. Oliver, W.C., Pharr, G.M., J. Mater. Res. 7, 1564 (1992)
13. Villain, P., PhD thesis, Université de Poitiers, France (2002)
14. Saha, R., Nix, W.D., Acta Mater. 50, 23 (2002).

Keywords

Mechanical properties and size effect in nanometric W/Cu multilayers

  • P. Villain (a1), D. Faurie (a1), P.-O. Renault (a1), E. Le Bourhis (a1), P. Goudeau (a1) and K.-F. Badawi (a1)...

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