- Cited by 19
Walter, K.C. Nastasi, M. and Munson, C. 1997. Adherent diamond-like carbon coatings on metals via plasma source ion implantation. Surface and Coatings Technology, Vol. 93, Issue. 2-3, p. 287.
Rej, D.J. Faehl, R.J. and Matossian, J.N. 1997. Key issues in plasma-source ion implantation. Surface and Coatings Technology, Vol. 96, Issue. 1, p. 45.
Kodali, P. Walter, K.C. and Nastasi, M. 1997. Investigation of mechanical and tribological properties of amorphous diamond-like carbon coatings. Tribology International, Vol. 30, Issue. 8, p. 591.
Walter, K.C Nastasi, M Baker, N.P Munson, C.P Scarborough, W.K Scheuer, J.T Wood, B.P Conrad, J.R Sridharan, K Malik, S and Bruen, R.A 1998. Advances in PSII techniques for surface modification. Surface and Coatings Technology, Vol. 103-104, Issue. , p. 205.
Hamdi, A.H Qiu, X Malaczynski, G.W Elmoursi, A.A Simko, S Militello, M.C Balogh, M.P Wood, B.P Walter, K.C and Nastasi, M.A 1998. Microstructure analysis of plasma immersion ion implanted diamond-like carbon coatings. Surface and Coatings Technology, Vol. 103-104, Issue. , p. 395.
Lee, D. H. He, X. M. Walter, K. C. Nastasi, M. Tesmer, J. R. Tuszewski, M. and Tallant, D. R. 1998. Diamondlike carbon deposition on silicon using radio-frequency inductive plasma of Ar and C2H2 gas mixture in plasma immersion ion deposition. Applied Physics Letters, Vol. 73, Issue. 17, p. 2423.
He, X. M. Bardeau, J.-F. Walter, K. C. and Nastasi, M. 1999. Characterization and enhanced properties of plasma immersion ion processed diamond-like carbon films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 17, Issue. 5, p. 2525.
He, X.M Walter, K.C Nastasi, M Lee, S.-T and Sun, X.S 1999. Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing. Thin Solid Films, Vol. 355-356, Issue. , p. 167.
He, Xiao-Ming Bardeau, J.-F. Lee, D. H. Walter, K. C. Tuszewski, M. and Nastasi, M. 1999. Optical properties of diamond-like carbon synthesized by plasma immersion ion processing. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue. 2, p. 822.
Malaczynski, Gerard W. Elmoursi, Alaa A. Leung, Chi H. Hamdi, Aboud H. and Campbell, Albert B. 1999. Surface enhancement by shallow carbon implantation for improved adhesion of diamond-like coatings. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue. 2, p. 813.
Mattox, Donald M. 2000. Ion plating — past, present and future. Surface and Coatings Technology, Vol. 133-134, Issue. , p. 517.
Nastasi, Michael He, Xiao-Ming Walter, Kevin C. Hakovirta, Marko and Trkula, Mitchell 2001. The use of plasma immersion ion processing in the synthesis of protective coatings for Al die casting. Surface and Coatings Technology, Vol. 136, Issue. 1-3, p. 162.
Yukimura, Ken and Masamune, Sadao 2002. Shunting arc plasma generation and ion extraction. Surface and Coatings Technology, Vol. 156, Issue. 1-3, p. 31.
Peters, A.M. and Nastasi, M. 2003. Titanium-doped hydrogenated DLC coatings deposited by a novel OMCVD-PIIP technique. Surface and Coatings Technology, Vol. 167, Issue. 1, p. 11.
Ryabchikov, A.I. Ryabchikov, I.A. and Stepanov, I.B. 2007. High frequency short-pulsed plasma-immersion ion implantation or deposition (HFSPPI3D). Surface and Coatings Technology, Vol. 201, Issue. 19-20, p. 8610.
Ryabchikov, A.I. Matvienko, V.M. and Stepanov, I.B. 2009. Coating deposition using vacuum arc and ablation metal plasma. Surface and Coatings Technology, Vol. 203, Issue. 17-18, p. 2735.
Ensinger, W. 2009. Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation. Surface and Coatings Technology, Vol. 203, Issue. 17-18, p. 2721.
Ryabchikov, A. I. Stepanov, I. B. Sivin, D. O. Dektyarev, S. V. and Dodorin, K. Yu. 2012. High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma (part one). p. 1.
Ryabchikov, A. I. Stepanov, I. B. Sivin, D. O. Dektyarev, S. V. and Dodorin, K. Yu. 2012. High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma (part two). p. 1.
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Ion beam processing, including ion implantation and ion beam assisted deposition (IBAD), are established surface modification techniques which have been used successfully to synthesize materials for a wide variety of tribological applications. In spite of the flexibility and promise of the technique, ion beam processing has been considered too expensive for mass production applications. However, an emerging technology, Plasma Source Ion Implantation (PSII), has the potential of overcoming these limitations to become an economically viable tool for mass industrial applications. In PSII, targets are placed directly in a plasma and then pulsed-biased to produce a non-line-of-sight process for intricate target geometries without complicated fixturing. If the bias is a relatively high negative potential (20-100kV) ion implantation will result. At lower voltages (50-1200V), deposition occurs. Potential applications for PSII are in low-value-added products such as tools used in manufacturing, orthopedic devices, and the production of wear coatings for hard disk media. This paper will focus on the technology and materials science associated with PSII.
Hide All1 Bhushan, B. and Gupta, B.K., Handbook of Tribology: Materials, Coatings, and Surface Treatments, McGraw-Hill, New York, 1991.2 Blau, P.J., Volume Chairman, Friction, Lubrication, and Wear Technology Volume 18 of the ASM Handbook Series (ASM International, Metals Park, 1992).3 Rej, D.J. and Alexander, R.B., J.Vac. Sci. Technol. B12, 2380 (1994).4 Smidt, F.A. and Sartwell, B.D., Nucl. Instr. Meth. B6, 70 (1985).5 Conrad, J.R., Radtke, J.L., Dodd, R.A., Worzala, F.J., J. Appl. Phys., 62, 4591 (1987).6 Wood, B.P., Henins, I., Gribble, R.J., Reass, W.A., Faehl, R.J., Nastasi, M.A., Rej, D.J., J. Vac. Sci. Technol., B12 870 (1994).7 Walter, K.C., Scheuer, J.T., Mclntyre, P.C., Kodali, P., Yu, N., Nastasi, M., Surf. Coat Tech., In press (1995).8 Scheuer, J.T., Walter, K.C., Blanchard, J.P., Rej, D.J., and Nastasi, M., In the Proceedings of the TMS Annual Meeting, February 1995, Las Vegas, NV. In Press.9 Tesmer, J.R. and Nastasi, M., eds. Handbook of Modern Ion Beam Materials Analysis, (Materials Research Society, 1995). Appendix 7.10 Holmberg, K., Matthews, A., Coatings Tribology: Properties, Techniques and Applications in Surface Engineering, edited by Dowson, D., Elsevier, Amsterdam, 1994, p. 53.11 Walter, K.C., Nastasi, M., Kung, H., Kodali, P., Munson, C., Henins, I., and Wood, B.P., Mat. Res. Soc. Symp. Proc. 383 (1995) in press.12 Grill, A., Patel, V., Meyerson, B.S., NATO ASI Series E, 266, 417 (1991).13 Walter, K.C., Kung, H., Levine, T., Tesmer, J.R., Kodali, P., Wood, B.P., Rej, D.J., Nastasi, M., Koskinen, J., Hirvonen, J.-P., Mat. Res. Soc. Symp. Proc, Fall 1994 MRS Meeting Symposium A, in press, 1994.14 Ronkainen, H., J. Likonen, J. Koskinen, Surf. Coating Technol. 54/55 (1992) 570–577.15 Monaghan, D.P., Teer, D.G., Logan, P.A., Efeoglu, I., Arnell, R.D., Surf. Coatings Technol., 60 (1993) 525–530.16 B.F. Coll, P. Sathrum, R. Aharonov, J.P. Peyre, M. Benmalek, presented at 19th Internataional Conference on Metallurgical Coatings and Thin Films (ICMCTF 92), San Diego, CA, USA, October 6–10, 1992.17 Rabalais, J.W. and Kasi, S., Science, 239 (1988) 623.18 Kichuchi, N., Komstsu, T., Yoshimura, H., Mater. Sci. Eng., A105–106 (1988) 623.19 A. Erdemir, , M. Switala, , R. Wei, , P.J. Wilbur, , Surf. Coatings and Technol., 50 (1991)20 Process for the Formation of Wear-and Scuff-Resistant Carbon Coatings, US Patent 5, 458, 927.
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