Skip to main content Accessibility help

Materials Characterization using THz Ellipsometry

  • Tino Hofmann (a1), Craig M. Herzinger (a2), John A. Woollam (a3) and Mathias Schubert (a4)


We employ spectroscopic ellipsometry in the terahertz (0.2 to 1.5 THz) and the mid-infrared (9 to 50 THz) spectral range for the non-contact, non-destructive optical determination of the free-charge-carrier properties of low-doped Silicon bulk and thin film structures. We find that carrier concentrations as low as 1015 cm−3 in thin films can be unambiguously determined. We envision ellipsometry in the THz spectral range for future non-contact, non-destructive monitoring and control applications.



Hide All
1. Pidgeon, C. in Handbook on Semiconductors, edited by Balkanski, M. (North-Holland, Amsterdam, 1980).
2. Grischkowsky, D. Keiding, S. Exter, M. van, and Fattinger, C. J. Opt. Soc. Am. B 7, 2006 (1990).
3. Herrmann, M. Tani, M. Sakai, K. and Fukasawa, R. J. Appl. Phys. 91, 1247 (2002).
4. Exter, M. van and Grischkowsky, D. Phys. Rev. B 41, 12140 (1990).
5. Katzenellenbogen, N. and Grischkowsky, D. Appl. Phys. Lett. 61, 840 (1992).
6. Fukasawa, R. Sakai, K. and Perkowitz, S. Jpn. J. Appl. Phys. 36, 5543 (1997).
7. Morikawa, O. Tonouchi, M. and Hangyo, M. Appl. Phys. Lett. 75, 3772 (1999).
8. Morikawa, O. Tonouchi, M. and Hangyo, M. App. Phys. Lett. 76, 1519 (2000).
9. Exter, M. van and Grischkowsky, D. Appl. Phys. Lett. 56, 1694 (1990).
10. Fujiwara, H. Spectroscopic Ellipsometry (John Wiley & Sons, New York, 2007).
11. Schubert, M. Infrared Ellipsometry on semiconductor layer structures: Phonons, plasmons and polaritons, vol. 209 of Springer Tracts in Modern Physics (Springer, Berlin, 2004).
12. Tiwald, T. Thompson, A. and Woollam, J. Journal of Vacuum Science & Technology B (Microelectronics and Nanometer Structures) 16, 312 (1998).
13. Ino, Y. Shimano, R. Svirko, Y. and Kuwata-Gonokami, M., Phys. Rev. B 70, 155101 (2004).
14. Hofmann, T. Schade, U. Agarwal, K. Daniel, B. Klingshirn, C. Hetterich, M. Herzinger, C., and Schubert, M. Appl. Phys. Lett. 88, 42105 (2006).
15. Hofmann, T. Schade, U. Eberhardt, W. Herzinger, C. Esquinazi, P. and Schubert, M. Rev. Sci. Inst. 77, 63902 (2006).
16. Nagashima, T. and Hangyo, M. Appl. Phys. Lett. 79, 3917 (2001).
17. Azzam, R. M. and Bashara, N. M. Ellipsometry and Polarized Light (North-Holland Publ. Co., Amsterdam, 1984).
18. Hofmann, T. C.Herzinger, M. T.Tiwald, E. Woollam, J.A. and Schubert, M. (to be published).
19. Schubert, M. Hofmann, T. and Sik, J., Phys. Rev. B 71, 35324 (2005).



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed