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Materials analysis by aberration-corrected STEM

Published online by Cambridge University Press:  01 February 2011

Ondrej L. Krivanek ,
Neil J. Bacon ,
George C. Corbin ,
Niklas Dellby ,
Andrew McManama-Smith ,
Matthew F. Murfitt ,
Peter D. Nellist  and
Zoltan S. Szilagyi
Ondrej L. Krivanek
Affiliation:
Nion Co., 1102 8th St, Kirkland, WA 98033, USA
Neil J. Bacon
Affiliation:
Nion Co., 1102 8th St, Kirkland, WA 98033, USA
George C. Corbin
Affiliation:
Nion Co., 1102 8th St, Kirkland, WA 98033, USA
Niklas Dellby
Affiliation:
Nion Co., 1102 8th St, Kirkland, WA 98033, USA
Andrew McManama-Smith
Affiliation:
Nion Co., 1102 8th St, Kirkland, WA 98033, USA
Matthew F. Murfitt
Affiliation:
Nion Co., 1102 8th St, Kirkland, WA 98033, USA
Peter D. Nellist
Affiliation:
Dept. of Physics, Trinity College Dublin, Dublin, Ireland
Zoltan S. Szilagyi
Affiliation:
Nion Co., 1102 8th St, Kirkland, WA 98033, USA
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Abstract

Electron-optical aberration correction has recently progressed from a promising concept to a powerful research tool. 100–120 kV scanning transmission electron microscopes (STEMs) equipped with spherical aberration (Cs) correctors now achieve sub-Å resolution in high-angle annular dark field (HAADF) imaging, and a 300 kV Cs-corrected STEM has reached 0.6 Å HAADF resolution. Moreover, the current available in an atom-sized probe has grown by about 10x, allowing electron energy loss spectroscopy (EELS) to detect single atoms. We summarize the factors that have made this possible, and outline likely future progress.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 839: Symposium P – Electron Microscopy of Molecular and Atom-Scale Mechanical Behavior, Chemistry, and Structure , 2004 , P1.4
Copyright
Copyright © Materials Research Society 2004

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References

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