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Marker Experiments for the moving Species in Silicides During Solid Phase Epitaxy of Evaporated Si

  • Chuen-Der Lien (a1), Meir Bartur (a1) and Marc-A. Nicolet (a1)

Abstract

Evaporated W, implanted Xe, and implanted 18O were used as markers to study the dominant moving species during (a) solid phase epitaxy (SPE) of evaporated Si, (b) silicide formation, and (c) oxidation of silicides on Si substrate.

MeV 4He+ backscattering spectrometry and 18O (p, α)15 N nuclear reaction were used to monitor the evolution of elemental profiles as well as the change in the marker position. In most cases, the dominant moving species in SPE is the same as that observed in the formation and oxidation of that silicide. However, in CrSi2 the dominant moving species is Si during silicide formation, but Cr during SPE or oxidation.

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References

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1. By “moving species”, we mean the species that moves with respect to and inert marker [4].
2. Nicolet, M-A. and Lau, S. S. in: VLSI Electronics: Microstructure Science, Einspruch, N. G., ed. Vol. 6, Einspruch, N. G. and Larrabee, G. B., eds. (Academic Press, New York, 1983), Chap. 6.
3. Bartur, M. and Nicolet, M-A., J. Appl. Phys. 54, 5407 (1983).
4. By “inert marker”, we mean a marker which is fixed to the silicide lattice during reaction and does not interfere with the reaction processes.
5. Lau, S. S., Liau, Z. L., and Nicolet, M-A., Thin Solid Films, 47, 313 (1977).
6. d’Heurle, F., Petersson, S., Stolt, L., and Strizker, B., J. Appl. Phys. 53, 5678 (1982).
7. Lien, C.-D., Nicolet, M-A., and Lau, S. S., (unpublished).
8. Finstad, T. G., Mayer, J. W., and Nicolet, M-A., Thin Solid Films, 51, 391 (1978).
9. d’Heurle, F., Thin Solid Films, 105, 285 (1983).
10. Scott, D. M. and Nicolet, M-A., phys. stat. sol. (a) 66, 773 (1981).
11. Chu, W. K., Lau, S. S., Mayer, J. W., Muller, H., and Tu, K. N., Thin Solid Films, 25, 393 (1975).
12. Scott, D. M., Ph.D. Thesis, California Institute of Technology (1982).
13. Lien, C.-D., Nicolet, M-A., Pai, C. S., and Lau, S. S., (unpublished).
14. Pretorius, R., Liau, Z. L., Lau, S. S., and Nicolet, M-A., Appl. Phys. Lett. 29, 598 (1976).
15. Pretorius, R., Botha, A. P., and Lombard, J. C., Thin Solid Films, 79, 61 (1981).
16. Martinez, A., Esteve, D., Guivarc’h, A., Auvray, P., Henoc, P., and Pelous, G., Solid State Electron. 23, 55 (1980).
17. Lien, C.-D., Wieluński, L. S., Nicolet, M-A., and Stika, K. M., Thin Solid Films, 104, 234 (1983).
18. Chen, J.-R., Liu, Y.-C., and Chu, S.-D., Appl. Phys. Lett. 40, 263 (1982).
19. Gösele, U. and Tu, K. N., J. Appl. Phys. 53, 3252 (1982).

Marker Experiments for the moving Species in Silicides During Solid Phase Epitaxy of Evaporated Si

  • Chuen-Der Lien (a1), Meir Bartur (a1) and Marc-A. Nicolet (a1)

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