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Manufacturing and Technology Requirements for Submicron Multilevel Metal

  • T. E. Seidel (a1)

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Multilevel Metal (MLM) technology has been driven by the need for ever faster switching speed. In the simplest considerations, this need has been described by the RC time constant applied to the metal interconnect runner embedded in a dielectric medium:

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Manufacturing and Technology Requirements for Submicron Multilevel Metal

  • T. E. Seidel (a1)

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