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Manufacturable Polymeric Optical Waveguide based Bus Structures for Board Level Optical Interconnects

  • Xinyuan Dou (a1), Xiaolong Wang (a2), Xiaohui Lin (a1) and Ray T. Chen (a1)

Abstract:

In this paper, we studied the optimization of preparation for polymeric optical waveguide based bus structures with embedded 45 degree micro-mirrors by metallic hard mold method. The 45º facets on the metallic hard mold, which were used to create the 45 degree micro-mirrors, were studied by the atomic force microscopy (AFM). The surface roughness of the 45 degree facets was reduced from 70nm to be 2nm by a photopolymer coating step. High speed test on the waveguide shows the low loss and high Q-factor performance of the waveguide structures. A backplane bus with 10 Gbits/sec channel will be reported.

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Keywords

Manufacturable Polymeric Optical Waveguide based Bus Structures for Board Level Optical Interconnects

  • Xinyuan Dou (a1), Xiaolong Wang (a2), Xiaohui Lin (a1) and Ray T. Chen (a1)

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