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The LPCVD of Silicon Nitride Films from Alkylazidosilanes

  • David A. Roberts (a1), Arthur K. Hochberg (a1), David L. O'Meara (a2), Felicia Rusnak (a1) and Herman Hockenhull (a1)...

Abstract

The series of azidosilanes, SiEtn(N3)4-n where n = 1,2,3 and Si(t-butyl)(N3)3 were evaluated for the LPCVD of silicon nitride thin films. Both SiEt(N3)3 and Si(t-butyl)(N3)3 gave deposition rates of approximately 100 Å/min at temperatures of 450–500°C but films appear to be porous and air sensitive. Film properties improved as deposition temperatures were increased to 600°C. The polyazides must be handled with extreme caution. An unexplained detonation of one sample of SiEt(N3)3 occurred during the course of this study.

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References

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1. Wolf, S. and Talbert, R. N., Silicon Processing for the VLSI Era, (Lattice Press, Sunset Beach, Ca. 1986), Chapter 6.
2. Brooks, T. A., Hess, D. W., Thin Film Solids, 153, 521 (1987).
3. Du, H., Gallois, B., Gonsalves, K. E., J. Am. Ceram. Soc., 73, 764, (1990).
4. Gordon, R. G., Hoffman, D. M., Riaz, U., Chem. Mater., 2, 480, (1990).
5. Nelson, U. S. Patent No 4,569,855.
6. Janca, J. et al. , Acta Phys. Slov., 33, 187 (1983).
7. Matsuda, H., Haruta, M., Eguchi, K., Nishimura, Y., Hirai, Y., Nakagiri, T., U. S. Patent No. 4,569,855 (February 11, 1986).
8. Gladfelter, W. L., Boyd, D. C., Hwang, J-W, Haasch, R. T., Evans, J. F., Ho, K-L, Jensen, K. F. in Chemical Perspectives of Microelectronic Materials, edited by Gross, M. E., Jasinski, J. M., Yates, J. T. Jr. (Mater. Res. Soc. Proc. 131, Pittsburgh, Pa. 1988) pp 447452.
9. Wiberg, N., Neruda, B., in Intern, Organosilicon Chem. Sci. Commun. Prague, 232–5 (1965) (CAS 66 37996t)
10. Reichele, W. T., Inorg. Chemistry, 3, 402, (1964).
11. Pan, P., J. Electrochem. Soc., 132, 3001 (1985).
12. Handbook of Chemistry and Physics, Weast ed. 1980.
13. Hochberg, A. K., O'Meara, D. L. preceding paper.
14. Ando, W., Tsumaki, H., Ikeno, M., J.C.S. Chem. Comm., 597 (1981).

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