Skip to main content Accessibility help
×
Home

Low-Temperature Homoepitaxial Growth of Gan Using Hyperthermal Molecular Beams

  • A. Michel (a1), E. Chen (a1), D. Thomson (a2), O. Nam (a2), R. F. Davis (a2) and H. H. Lamb (a1)...

Abstract

In situ cleaning of MOCVD-grown GaN/AlN/6H-SiC substrates using NH3-seeded supersonic molecular beams was investigated. Removal of surface carbon and oxygen contaminants was achieved by heating at 730°C under a hyperthermal NH 3 beam. Oxygen is removed primarily by thermal desorption; however, carbon removal requires an NH3 flux. Atomically smooth surfaces with regular steps are obtained after NH3 beam cleaning. Homoepitaxial growth of smooth, highly textured GaN films was accomplished at 700°C by employing a 0.61-eV NH3 beam and an effusive Ga source.

    • Send article to Kindle

      To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

      Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

      Find out more about the Kindle Personal Document Service.

      Low-Temperature Homoepitaxial Growth of Gan Using Hyperthermal Molecular Beams
      Available formats
      ×

      Send article to Dropbox

      To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

      Low-Temperature Homoepitaxial Growth of Gan Using Hyperthermal Molecular Beams
      Available formats
      ×

      Send article to Google Drive

      To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

      Low-Temperature Homoepitaxial Growth of Gan Using Hyperthermal Molecular Beams
      Available formats
      ×

Copyright

References

Hide All
1. Neumayer, D. A. and Ekert, J. G., Chem. Mater. 8, 9 (1996).
2. Mohammad, S. N. and Morkoc, H., Prog. Quant. Electr. 20, 361 (1996).
3. Lamb, H. H., Lai, K. K., Torres, V. and Davis, R. F. in Film Synthesis and Growth Using Energetic Beams, (Mater. Res. Soc. Proc. 388, 1995) pp. 265.
4. Sumakeris, J. J., Chilukuri, R. K., Davis, R. F. and Lamb, H. H. in Gallium Nitride and Related Materials, (Mater. Res. Soc. Proc. 395, 1996) pp. 331.
5. Sellidj, A., Ferguson, B. A., Mattord, T. J., Streetman, B. G. and Mullins, C. B., Appl. Phys. Lett. 68, 3314 (1996).
6. Chilukuri, R. K., Zhang, S., Chen, E., Davis, R. F. and Lamb, H. H. in III-V Nitride, (Mater. Res. Soc. Proc. 449, 1997) pp. 355.
7. Miller, D. R., in Atomic and Molecular Beam Methods, edited by Scoles, G. (Oxford University Press, 1988), p. 14.
8. Torres, V., Meloni, M. and Doak, R. B., (To be published).
9. Bauer, E. (personal communication).
10. Held, R., Crawford, D. E., Johnston, A. M., Dabiran, A. M. and Cohen, P. I., J. Electron Mater. 26, 272 (1997).

Low-Temperature Homoepitaxial Growth of Gan Using Hyperthermal Molecular Beams

  • A. Michel (a1), E. Chen (a1), D. Thomson (a2), O. Nam (a2), R. F. Davis (a2) and H. H. Lamb (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed