Skip to main content Accessibility help

Low-Temperature Deposition of ZrC thin films from a Single-Source Precursor

  • David C. Smith (a1), Rodrigo R. Rubiano (a2), Matthew D. Healy (a1) and Robert W. Springer (a1)


Stable zirconium carbide thin films have been deposited from a singlesource organometallic precursor, tetraneopentyl zirconium, at substrate temperatures above 500 °C. Materials deposited above this temperature are crystalline by X-ray diffraction. A metal to carbon ratioof 1:2 is observed by Auger electron spectroscopy depth profiling. X-ray photoelectron spectroscopy indicates the zirconium is single phase. The observed spectra correspond well to spectra for zirconium carbide standards. Carbon XPS reveals carbidic and graphitic or hydrocarbon species with a third unknown carbon species. Elastic recoil detection finds a large, up to 16%, hydrogen content in the thin film.



Hide All
1. Schwarzkopf, P., Kieffer, P., Leszynski, W., and Benesovsky, F., Refractory Hard Metals (Macmillan, New York, 1953).
2. Storms, E.K., The Refractory Carbides (Academic, New York, 1967).
3. Toth, L. E., Transition Metal Carbides and Nitrides (Academic, New York, 1971).
4. Samsonov, G. V., Ed., Refractory Carbides (Consultants Bureau, New York, 1974).
5. Blair, H. T., Carroll, D. W., and Matthews, R. B., in Proceedings of the 8th Symposium on Space Nuclear Power Systems, (Albuquerque, NM, 1990).
6. Girolami, G. S. and Gozum, J. E., MRS Symp. Proc. 168, 319 (1990), and references therein.
7. Rutherford, N. M, Larson, C. E., and Jackson, R. L., MRS Symp. Proc. 131, 439 (1989).
8. Stupik, P. D., Cheatham, L. K., Graham, J. J., and Barron, A. R., MRS Symp. Proc. 168, 363(1990).
9. Huchet, G. and Teyssandier, F., in Proceedings of the Eleventh International Conference on Chemical Vapor Deposition, edited by Spear, K. E. and Cullen, G. W. (The Electrochemical Society, Pennington, NJ, 1990) pp. 703709.
10. Maury, F. and Ossola, F., Thin Solid Films 207, 82 (1992).
11. Davidson, P. J., Lappert, M. F., and Pearce, R., J. Organomet. Chem. 57, 269 (1973).
12. Girolami, G. S., Jensen, J. A., Pollina, D. M., Williams, W. S., Kaloyeros, A. E., and Alloca, C. M., J. Am. Chem. Soc. 109, 1579 (1987).
13. Deconvolution routines were written at Los Alamos National Laboratory.
14. Sample provided by Stark, W. A. of Los Alamos National Laboratory.
15. Cullity, B. D., Elements of X-ray Diffraction (Addison-Wesley, Readings, 1978).
16. Vossen, J. L. and Kern, W., Eds., Thin Film Processes II (Academic, New York, 1991).
17. Kaloyeros, A. E., Williams, W. S., Brown, F. C., Greene, A. E., and Woodhouse, J. B., Phys. Rev. B 37, 771 (1988).
18. Fix, R., Gordon, R. G., Hoffman, D. M., Chem. Mater. 3, 1138 (1991).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed