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A Low Temperature Polycrystalline Si TFT Technology for Large area AMLCD Drivers

  • Krishna C. Saraswat (a1), V. Subramanian (a1) and S. Jurichich (a1)

Abstract

In this paper we describe a low thermal budget technology to fabricate high performance CMOS thin-film transistors (TFTs) in polycrystalline silicon and silicon/germanium on low cost glass substrates, for active-matrix liquid crystal display (AMLCD) applications. Based on modeling of delay times of the scan and data lines driven by n-channel TFTs we show that for AMLCDs with integrated drive circuits, mobility in excess of 40 cm2/V. sec will be required. Through proper optimization of amorphous film deposition, crystallization (nucleation and grain growth), fabrication process parameters and device structure we have obtained mobility in excess of 50 cm2/V. sec in Si TFTs, using conventional manufacturing technology compatible with glass substrates. Economic modeling suggests that low-temperature poly-TFT LCDs with integrated drivers will have a competitive manufacturing cost to LCDs of an equivalent size and resolution with α-Si pixel TFTs and single crystal drivers.

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A Low Temperature Polycrystalline Si TFT Technology for Large area AMLCD Drivers

  • Krishna C. Saraswat (a1), V. Subramanian (a1) and S. Jurichich (a1)

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