Skip to main content Accessibility help
×
Home

Low Temperature - High Pressure Oxidation of 3C-SiC

  • Christine Caragianis-Broadbridge (a1), Barbara L. Walden (a2), Juliana Blaser (a3), Cleva Ow Yang (a3) and David C. Paine (a3)...

Abstract

Single crystal films of n-type 3C-SiC were hydrothermally processed at pressures ranging from 10 to 70 MPa at 550°C. To study the effects of initial thin film microstructure on hydrothermal processing, two different samples of CVD-grown SiC were studied: one, 200 nm thick, contained low angle boundaries and a high density of planar defects; the other, 3500 nm thick, was planar and contained relatively few defects. Raman Spectroscopy, X-Ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM) were used to study the chemistry and microstructure of the SiC material both before and after hydrothermal treatment. This study reveals that low temperature (T=550°C) oxidation of single crystal epitaxial SiC is possible but that the resulting oxide film microstructure is strongly dependent on the initial film microstructure and oxidation is greatly enhanced along low angle grain boundaries and on planar defects.

Copyright

References

Hide All
1. Ivanov, P. A. and Chelnokov, V. E., Semicond. Sci. Technol, 7, 863(1992).
2. Morkoc, H., Strite, S., Gao, G. B., Lin, M. E., Sverdlov, B. and Bums, M., J. Appl. Phys., 26(3), 1363(1994).
3. Paine, D.C., Caragianis, C., and Schwartzman, A. F., J. Appl. Phys., 70(9), 5076(1991).
4. Paine, D. C., Caragianis, C., and Shigesato, Yuzo, Appl., Phys. Letts., 62(22), 2842(1993).
5. Caragianis, C., Shigesato, Y., and Paine, D. C., J. Electronic Materials1, 3(9),883(1994).
6. Rickman, G., Sensor Review, 14(1), 27(1994).
7. Gototsi, Y. G. and Yoshimura, M., MRS Bulletin, 19(9), 39(1994).
8. Pirouz, P., Chorey, C. M., and Powell, J. A., Appl. Phys. Lett., 50(4), 221(1987).
9. Cree Research, Inc., Durham, NC 27713.
10. Caragianis, C., Paine, D. C., Roberts, C., and Crisman, E., in Chemical Perspectives of Microelectronic Material II, (MRS, Pittsburgh, 1991), p. 361.
11. Paine, D.C., Caragianis, C., and Shigesato, Y., Appl. Phys. Lett. 60(23), 2886(1992)
12. Schmidt, E., Properties of Water and Steam in SI-Units. Second edition ed. Grigull, U.. 1979, Munchen: Spring-Verlag.
13. Rutherford, M. J., Sigurdsson, H., Carey, S., and Davis, A., J. Geophys. Res., 90, 2929(1985).
14. Feng, Z. C., Choyke, W. J., Powell, J. A., J. Appi. Phys., 4, 6827(1988).
15. Tsai, H-C., Bogy, D. B., J. Vac. Sci. Technol. A, 5, 3287 (1987).
16. Wagner, C. D. et al. , PHI Handbook of Photoelectron Spectroscopy (Perkin-Elmer Corp., Eden Prairie, Mn, 1979).
17. Powell, J. A., Petit, J. B., Edgar, J.H., Jenkins, I. G., and Matus, L. G., Appl. Phys. Lett. 59 (2) 183(1991).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed