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Liquid Source Mocvd of High Quality Yba2Cu3O7−x Films on Polycrystalline And Amorphous Substrates
Published online by Cambridge University Press: 10 February 2011
Abstract
High temperature superconducting Yba2Cu3O7−x films were grown by liquid delivery metal-organic chemical vapor deposition (LDMOCVD) on silver-coated stainless steel substrates. The films are c-axis oriented, and exhibit a very low surface resistance of 110 μΩ at 77 K and 3 GHz. A two-step LDMOCVD method for growth of oriented (200) CeO2 films on amorphous substrates was also developed. Films of CeO2 for YBCO buffer layers were grown on fused silica (SiO2), polycrystalline alumina (Al2O3), and sapphire (A12O3). A highly c-axis oriented film of YBCO was grown on a fused silica substrate with a CeO2 buffer layer.
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- Copyright © Materials Research Society 1996
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