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Leakage Currents in CVD (Ba,Sr)TiO3 Thin Films

  • C. Basceri (a1), S.K. Streiffer (a1), A.I. Kingon (a1), S. Bilodeau (a2), R. Carl (a2), P.C. Van Buskirk (a2), S.R. Summerfelt (a3), P. Mcintyre (a3) and R. Waser (a4)...


We have analyzed the leakage behavior of polycrystalline MOCVD (Ba,Sr)TiO3 thin films as a function of both temperature and field. Of the possible mechanisms, thermionic (Schottky) emission gives a self-consistent description of the temperature and field dependencies of the true leakage current for fields in the range of 240–970 kV/cm, and yields realistic barrier heights of 1.2 eV for Pt as the cathode material. For film thicknesses of interest for use in DRAMs, the capacitance-voltage characteristics are explained via Landau-Ginzburg-Devonshire theory. Preliminary resistance degradation studies are also discussed.



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[1] Scott, J.F., Azuma, M., Fujii, E., Otsuki, T., Kano, G., Scott, M.C., Araujo, C.A. Paz De, McMillan, L.D., and Roberts, T., Proc. of the 1992 IEEE Int. Symp. Appl. Ferro., 356 (1992).
[2] Makita, T., Horikawa, T., Kuroki, H., Kataoka, M., Tanimura, J., Mikami, N., Sato, K., and Nunoshita, M., Mat. Res. Soc. Symp. Proc. 284, 529 (1993).
[3] Kuroiwa, T., Honda, T., Watarai, H., Mikami, N., Horikawa, T., Makita, T., and Sato, K., Ceramic Transactions 43, 219 (1994).
[4] Hwang, C.S., Park, S.O., Kang, C.S., Cho, H.J., Kang, H.K., Ahn, S.T., and Lee, M.Y., Jpn. J. Appl. Phys. 34, 5178 (1995).
[5] Kiyotoshi, M. and Eguchi, K., Appl. Phys. Lett. 67, 2468 (1995).
[6] Hwang, C.S., Park, S.O., Cho, H.J., Kang, C.S., Kang, H.K., Lee, S.I., and Lee, M.Y., Appl. Phys. Lett. 67, 2819 (1995).
[7] Waser, R., in Science and Technology of Electroceramic Thin Films: NATO ASI Series Vol.284, ed, Auciello, O. and Waser, R. (London: Kluwer Academic Publishers, 1995) pp. 223248.
[8] Dietz, G. W., Antpohler, W., Klee, M., and Waser, R., J. Appl. Phys. 78, 1 (1995).
[9] Dey, S., Alluri, P., Lee, J.J., and Zuleeg, R., Integrated Ferroelectrics 7, 341 (1995).
[10] Numata, K., Fukuda, Y., Aoki, K., and Nishimura, A., Jpn. J. Appl. Phys. 34, 5245 (1995).
[11] Kirlin, P., Bilodeau, S., and Buskirk, P. van, Integrated Ferroelectrics 7, 307 (1995).
[12] Summerfelt, S.R., Kotecki, D., Kingon, A.l., and Al-Shareef, H.N., MRS Symp. Proc. 361, 257 (1995).
[13] Streiffer, S.K., Basceri, C., Kingon, A.I., Lipa, S., Bilodeau, S., Carl, R., and Buskirk, P.C. van, MRS Symp. Proc., in press (1996).
[14] Dietz, G., Schumacher, M., Waser, R., Streiffer, S.K., Basceri, C., and Kingon, A.I., to be published.
[15] Lines, M.E. and Glass, A.M., Principles and Applications of Ferroelectrics and Related Materials (Oxford: Clarendon Press, 1977) pp. 7181.
[16] Waser, R., Baiatu, T., and Hardtl, K.-H., J. Am. Cer. Soc. 73, 1645 (1990); R. Waser, T. Baiatu, and K.-H. Hardtl, J. Am. Cer. Soc. 73, 1654 (1990); T. Baiatu, R. Waser, and K.-H. Hardtl, J. Am. Cer. Soc. 73, 1663 (1990).

Leakage Currents in CVD (Ba,Sr)TiO3 Thin Films

  • C. Basceri (a1), S.K. Streiffer (a1), A.I. Kingon (a1), S. Bilodeau (a2), R. Carl (a2), P.C. Van Buskirk (a2), S.R. Summerfelt (a3), P. Mcintyre (a3) and R. Waser (a4)...


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